Thermal Oxidation of Phosphorus‐Doped Polycrystalline Silicon in Wet Oxygen

1978 ◽  
Vol 125 (6) ◽  
pp. 892-897 ◽  
Author(s):  
Hideo Sunami
Keyword(s):  
Thermal Oxidation ◽  
Polycrystalline Silicon ◽  
Phosphorus Doped

Optical characterization of polycrystalline silicon before and after thermal oxidation

1985 ◽  
Vol 125 (3-4) ◽  
pp. 235-241 ◽  
Author(s):  
P. Montaudon ◽  
M.H. Debroux ◽  
F. Ferrieu ◽  
A. Vareille
Keyword(s):  
Thermal Oxidation ◽  
Polycrystalline Silicon ◽  
Optical Characterization ◽  
Before And After

Contrast enhancement pattern transfer etching of phosphorus‐doped polycrystalline silicon

1987 ◽  
Vol 51 (17) ◽  
pp. 1328-1330 ◽  
Author(s):  
N. Hayasaka ◽  
H. Nakahara ◽  
H. Okano ◽  
Y. Horiike
Keyword(s):  
Contrast Enhancement ◽  
Polycrystalline Silicon ◽  
Pattern Transfer ◽  
Enhancement Pattern ◽  
Phosphorus Doped

Boron- and phosphorus-doped polycrystalline silicon thin films prepared by silver-induced layer exchange

2013 ◽  
Vol 102 (21) ◽  
pp. 212102 ◽  
Author(s):  
T. Antesberger ◽  
T. A. Wassner ◽  
C. Jaeger ◽  
M. Algasinger ◽  
M. Kashani ◽  
...  
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films ◽  
Phosphorus Doped
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