Thermal Oxidation of Heavily Phosphorus‐Doped Thin Films of Polycrystalline Silicon

1982 ◽  
Vol 129 (10) ◽  
pp. 2321-2326 ◽  
Author(s):  
Krishna C. Saraswat ◽  
Harinder Singh
Keyword(s):  
Thin Films ◽  
Thermal Oxidation ◽  
Polycrystalline Silicon ◽  
Phosphorus Doped

Boron- and phosphorus-doped polycrystalline silicon thin films prepared by silver-induced layer exchange

2013 ◽  
Vol 102 (21) ◽  
pp. 212102 ◽  
Author(s):  
T. Antesberger ◽  
T. A. Wassner ◽  
C. Jaeger ◽  
M. Algasinger ◽  
M. Kashani ◽  
...  
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films ◽  
Phosphorus Doped

Microstructures of Polysilicon

1987 ◽  
Vol 106 ◽  
Author(s):  
R. Sinclair ◽  
A. H. Carim ◽  
J. Morgiel ◽  
J. C. Bravman
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Transmission Electron Microscopy ◽  
Polycrystalline Silicon ◽  
Transmission Electron ◽  
Polysilicon Films ◽  
In Situ Heating ◽  
Phosphorus Doped ◽  
Microstructural Studies

ABSTRACTSome typical microstructural studies of polycrystalline silicon using transmission electron microscopy (TEM) are described, including the application of this material for assisting TEM investigations themselves. Examples include oxidation and realignment of polysilicon thin films, the structure of polysilicon in EEPROM devices, polysilicon in trench capacitors and measurement of SiO2 layer thicknesses with polysilicon overlayers. It is also shown tha grain growth in heavily phosphorus doped polysilicon films can be followed by in situ heating in the TEM.

Growth and physical properties of in situ phosphorus-doped RTLPCVD polycrystalline silicon thin films

1998 ◽  
Vol 1 (3-4) ◽  
pp. 299-302 ◽  
Author(s):  
S Kallel ◽  
B Semmache ◽  
M Lemiti ◽  
Ch Dubois ◽  
H Jaffrezic ◽  
...  
Keyword(s):  
Thin Films ◽  
Physical Properties ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films ◽  
Phosphorus Doped

Characteristics of the thermal oxidation of heavily boron-doped polycrystalline silicon thin films

1996 ◽  
Vol 279 (1-2) ◽  
pp. 145-154 ◽  
Author(s):  
M. Boukezzata ◽  
D. Bielle-Daspet ◽  
G. Sarrabayrouse ◽  
F. Mansour
Keyword(s):  
Thin Films ◽  
Thermal Oxidation ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films ◽  
Boron Doped
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