Point Defect Generation during Phosphorus Diffusion in Silicon: I . Concentrations above Solid Solubility

1987 ◽  
Vol 134 (6) ◽  
pp. 1508-1518 ◽  
Author(s):  
J. C. C. Tsai ◽  
D. G. Schimmel ◽  
R. B. Fair ◽  
W. Maszara
Keyword(s):  
Point Defect ◽  
Solid Solubility ◽  
Phosphorus Diffusion ◽  
Defect Generation

Point‐defect generation during oxidation of silicon in dry oxygen. I. Theory

1986 ◽  
Vol 59 (7) ◽  
pp. 2541-2550 ◽  
Author(s):  
Scott T. Dunham ◽  
James D. Plummer
Keyword(s):  
Point Defect ◽  
Defect Generation

Point defect generation in pulsed impure solids

1976 ◽  
Vol 30 (3) ◽  
pp. 183-184
Author(s):  
J. S. Koehler
Keyword(s):  
Point Defect ◽  
Defect Generation
Sign in / Sign up

Export Citation Format

Share Document