Light Point Defect Generation during Photoresist Spin Coating: Characterization and Controlling Parameters

1997 ◽  
Vol 144 (10) ◽  
pp. 3608-3613
Author(s):  
L. Mouche ◽  
M. Meuris ◽  
M. M. Heyns
Keyword(s):  
Point Defect ◽  
Spin Coating ◽  
Defect Generation ◽  
Light Point

Point‐defect generation during oxidation of silicon in dry oxygen. I. Theory

1986 ◽  
Vol 59 (7) ◽  
pp. 2541-2550 ◽  
Author(s):  
Scott T. Dunham ◽  
James D. Plummer
Keyword(s):  
Point Defect ◽  
Defect Generation

Point defect generation in pulsed impure solids

1976 ◽  
Vol 30 (3) ◽  
pp. 183-184
Author(s):  
J. S. Koehler
Keyword(s):  
Point Defect ◽  
Defect Generation

The Growth of Oxidation Stacking Faults and the Point Defect Generation at Si ‐ SiO Interface during Thermal Oxidation of Silicon

1981 ◽  
Vol 128 (5) ◽  
pp. 1121-1130 ◽  
Author(s):  
A. Miin‐Ron Lin ◽  
Robert W. Dutton ◽  
Dimitri A. Antoniadis ◽  
William A. Tiller
Keyword(s):  
Point Defect ◽  
Thermal Oxidation ◽  
Stacking Faults ◽  
Defect Generation
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