Prediction of Ion Energy and Angular Distributions in Single and Dual Frequency Plasmas

Frank R. Myers; Manjula Ramaswami; Timothy S. Cale

doi:10.1149/1.2054916

Prediction of Ion Energy and Angular Distributions in Single and Dual Frequency Plasmas

Journal of The Electrochemical Society ◽

10.1149/1.2054916 ◽

1994 ◽

Vol 141 (5) ◽

pp. 1313-1320 ◽

Cited By ~ 12

Author(s):

Frank R. Myers ◽

Manjula Ramaswami ◽

Timothy S. Cale

Keyword(s):

Angular Distributions ◽

Dual Frequency ◽

Ion Energy ◽

Energy And Angular Distributions

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Control of ion energy and angular distributions in dual-frequency capacitively coupled plasmas through power ratios and phase: Consequences on etch profiles

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4915248 ◽

2015 ◽

Vol 33 (3) ◽

pp. 031302 ◽

Cited By ~ 19

Author(s):

Yiting Zhang ◽

Mark J. Kushner ◽

Saravanapriyan Sriraman ◽

Alexei Marakhtanov ◽

John Holland ◽

...

Keyword(s):

Angular Distributions ◽

Dual Frequency ◽

Ion Energy ◽

Capacitively Coupled ◽

Energy And Angular Distributions ◽

Coupled Plasmas

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Space and phase resolved ion energy and angular distributions in single- and dual-frequency capacitively coupled plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4822100 ◽

2013 ◽

Vol 31 (6) ◽

pp. 061311 ◽

Cited By ~ 12

Author(s):

Yiting Zhang ◽

Mark J. Kushner ◽

Nathaniel Moore ◽

Patrick Pribyl ◽

Walter Gekelman

Keyword(s):

Angular Distributions ◽

Dual Frequency ◽

Ion Energy ◽

Capacitively Coupled ◽

Energy And Angular Distributions ◽

Coupled Plasmas

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Ion Energy and Angular Distributions in a Dual-Frequency Capacitively Coupled Chlorine Discharge

IEEE Transactions on Plasma Science ◽

10.1109/tps.2014.2323816 ◽

2014 ◽

Vol 42 (10) ◽

pp. 2854-2855 ◽

Cited By ~ 4

Author(s):

Shuo Huang ◽

Jon Tomas Gudmundsson

Keyword(s):

Angular Distributions ◽

Dual Frequency ◽

Ion Energy ◽

Capacitively Coupled ◽

Energy And Angular Distributions

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Numerical study of ion energy and angular distributions in dual‐frequency capacitively coupled CF4 plasmas

Physics of Plasmas ◽

10.1063/1.3684675 ◽

2012 ◽

Vol 19 (2) ◽

pp. 023506 ◽

Cited By ~ 5

Author(s):

Wang Shuai ◽

Xu Xiang ◽

Wang Younian

Keyword(s):

Numerical Study ◽

Angular Distributions ◽

Dual Frequency ◽

Ion Energy ◽

Capacitively Coupled ◽

Energy And Angular Distributions

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A self-consistent hybrid model of a dual frequency sheath: Ion energy and angular distributions

Physics of Plasmas ◽

10.1063/1.2434250 ◽

2007 ◽

Vol 14 (1) ◽

pp. 013507 ◽

Cited By ~ 27

Author(s):

Zhong-Ling Dai ◽

Xiang Xu ◽

You-Nian Wang

Keyword(s):

Hybrid Model ◽

Angular Distributions ◽

Dual Frequency ◽

Ion Energy ◽

Self Consistent ◽

Energy And Angular Distributions

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Numerical investigation of ion energy and angular distributions in a dc-biased H2 inductively coupled discharge

Physics of Plasmas ◽

10.1063/5.0012770 ◽

2020 ◽

Vol 27 (9) ◽

pp. 093512

Author(s):

Sha-Sha Song ◽

Wei Liu ◽

Shuai Yin ◽

Yong-Xin Liu ◽

Fei Gao ◽

...

Keyword(s):

Numerical Investigation ◽

Angular Distributions ◽

Ion Energy ◽

Inductively Coupled ◽

Energy And Angular Distributions

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Control of ion energy and angular distributions using voltage waveform

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th IEEE International Conference (Cat. No.99CH36297) ◽

10.1109/plasma.1999.829297 ◽

2003 ◽

Author(s):

S. Rauf

Keyword(s):

Angular Distributions ◽

Voltage Waveform ◽

Ion Energy ◽

Energy And Angular Distributions

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Ion energy and angular distributions in inductively driven RF discharges in chlorine

10.2172/231654 ◽

1996 ◽

Author(s):

J.R. Woodworth ◽

M.E. Riley ◽

T.W. Hamilton

Keyword(s):

Angular Distributions ◽

Ion Energy ◽

Rf Discharges ◽

Energy And Angular Distributions

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Ion energy and angular distributions onto polymer surfaces delivered by dielectric barrier discharge filaments in air: II. Particles

Plasma Sources Science and Technology ◽

10.1088/0963-0252/20/3/035018 ◽

2011 ◽

Vol 20 (3) ◽

pp. 035018 ◽

Cited By ~ 5

Author(s):

Natalia Yu Babaeva ◽

Mark J Kushner

Keyword(s):

Dielectric Barrier Discharge ◽

Barrier Discharge ◽

Polymer Surfaces ◽

Angular Distributions ◽

Dielectric Barrier ◽

Ion Energy ◽

Energy And Angular Distributions

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Calculation of the backscattered ion energy and angular distributions during the grazing implantation

Vacuum ◽

10.1016/0042-207x(95)80075-1 ◽

1995 ◽

Vol 46 (4) ◽

pp. 383-388 ◽

Cited By ~ 2

Author(s):

IE Mozolevsky

Keyword(s):

Angular Distributions ◽

Ion Energy ◽

Energy And Angular Distributions

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