Comparison of the Atomic Layer Deposition of Tantalum Oxide Thin Films Using Ta(NtBu)(NEt2)3, Ta(NtBu)(NEt2)2Cp, and H2O

2016 ◽  
Vol 9 (1) ◽  
pp. 537-547 ◽  
Author(s):  
Seul Ji Song ◽  
Taehyung Park ◽  
Kyung Jean Yoon ◽  
Jung Ho Yoon ◽  
Dae Eun Kwon ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tantalum Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Properties of tantalum oxide thin films grown by atomic layer deposition

1995 ◽  
Vol 260 (2) ◽  
pp. 135-142 ◽  
Author(s):  
Kaupo Kukli ◽  
Jaan Aarik ◽  
Aleks Aidla ◽  
Oksana Kohan ◽  
Teet Uustare ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tantalum Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Atomic Layer Deposition of Tantalum Oxide Thin Films from Iodide Precursor

2001 ◽  
Vol 13 (1) ◽  
pp. 122-128 ◽  
Author(s):  
Kaupo Kukli ◽  
Jaan Aarik ◽  
Aleks Aidla ◽  
Katarina Forsgren ◽  
Jonas Sundqvist ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tantalum Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Photo-Induced Atomic Layer Deposition of Tantalum Oxide Thin Films from Ta(OC[sub 2]H[sub 5])[sub 5] and O[sub 2]

2004 ◽  
Vol 151 (1) ◽  
pp. C52 ◽  
Author(s):  
Young-Hoon Lee ◽  
Jae-Chan Kwak ◽  
Bong-Suck Gang ◽  
Hie-Chul Kim ◽  
Byung-Ho Choi ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tantalum Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

ChemInform Abstract: Atomic Layer Deposition of Tantalum Oxide Thin Films from Iodide Precursor.

ChemInform ◽  
2001 ◽  
Vol 32 (19) ◽  
pp. no-no
Author(s):  
Kaupo Kukli ◽  
Jaan Aarik ◽  
Aleks Aidla ◽  
Katarina Forsgren ◽  
Jonas Sundqvist ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tantalum Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Fabrication of GdxFeyOz films using an atomic layer deposition-type approach

CrystEngComm ◽  
2021 ◽  
Author(s):  
Pengmei Yu ◽  
Sebastian M. J. Beer ◽  
Anjana Devi ◽  
Mariona Coll
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Complex Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Atomic Precision

The growth of complex oxide thin films with atomic precision offers bright prospects to study improved properties and novel functionalities.

Cyclopentadienyl Precursors for the Atomic Layer Deposition of Erbium Oxide Thin Films

2014 ◽  
Vol 20 (7-8-9) ◽  
pp. 217-223 ◽  
Author(s):  
Timothee Blanquart ◽  
Mikko Kaipio ◽  
Jaakko Niinistö ◽  
Marco Gavagnin ◽  
Valentino Longo ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Erbium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition
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