Power Measurements for Radio‐Frequency Discharges with a Parallel‐Plate‐Type Reactor

1998 ◽  
Vol 145 (5) ◽  
pp. 1701-1708 ◽  
Author(s):  
Hiroaki Kawata ◽  
Takashi Kubo ◽  
Masaaki Yasuda ◽  
Kenji Murata
Keyword(s):  
Radio Frequency ◽  
Parallel Plate ◽  
Type Reactor ◽  
Radio Frequency Discharges ◽  
Power Measurements ◽  
Plate Type

A self-consistent fluid model for radio-frequency discharges in SiH4–H2 compared to experiments

1997 ◽  
Vol 82 (5) ◽  
pp. 2060-2071 ◽  
Author(s):  
G. J. Nienhuis ◽  
W. J. Goedheer ◽  
E. A. G. Hamers ◽  
W. G. J. H. M. van Sark ◽  
J. Bezemer
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Self Consistent ◽  
Radio Frequency Discharges

Excitation in radio-frequency discharges

1963 ◽  
Vol 19 (8) ◽  
pp. 1309-1317 ◽  
Author(s):  
R. Mavrodineanu ◽  
R.C. Hughes
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharges

The Fluid Power Control Performance Comparison Study of Two-Type ER Valve Based on FLUENT

2012 ◽  
Vol 472-475 ◽  
pp. 1989-1994
Author(s):  
Shi Sha Zhu ◽  
Liu Tao
Keyword(s):  
Pressure Drop ◽  
Power Control ◽  
Parallel Plate ◽  
Control Volume ◽  
Flow Simulation ◽  
Control Valve ◽  
Performance Comparison ◽  
Fluid Power ◽  
Control Performance ◽  
Plate Type

The current flow and pressure drop of ER valve which is a new type power control valve could be adjusted by the electric field signal directly .In this paper, the fluid power control performance of concentric cylindrical ER valve and parallel plate-type ER valve based on ER principal is comparative studied .First power control equation has been analysed, and then flow simulation of internal flow field of ER valve has been taken based on FLUENT software. The results show that with the increasing of the strength of excitation field, the flow through the two different type of ER valve decreases, the pressure drop between import and export is even greater; and the fluid power control performance of parallel plate-type ER valve is superior to concentric cylindrical ER valve under the same control volume.

Modeling of electronegative radio-frequency discharges

1991 ◽  
Vol 19 (2) ◽  
pp. 122-129 ◽  
Author(s):  
M. Meyyappan ◽  
T.R. Govindan
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharges
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