Electron and metastable densities in parallel‐plate radio‐frequency discharges

1993 ◽  
Vol 73 (12) ◽  
pp. 8126-8133 ◽  
Author(s):  
K. E. Greenberg ◽  
G. A. Hebner
Keyword(s):  
Radio Frequency ◽  
Parallel Plate ◽  
Radio Frequency Discharges

Power Measurements for Radio‐Frequency Discharges with a Parallel‐Plate‐Type Reactor

1998 ◽  
Vol 145 (5) ◽  
pp. 1701-1708 ◽  
Author(s):  
Hiroaki Kawata ◽  
Takashi Kubo ◽  
Masaaki Yasuda ◽  
Kenji Murata
Keyword(s):  
Radio Frequency ◽  
Parallel Plate ◽  
Type Reactor ◽  
Radio Frequency Discharges ◽  
Power Measurements ◽  
Plate Type

A self-consistent fluid model for radio-frequency discharges in SiH4–H2 compared to experiments

1997 ◽  
Vol 82 (5) ◽  
pp. 2060-2071 ◽  
Author(s):  
G. J. Nienhuis ◽  
W. J. Goedheer ◽  
E. A. G. Hamers ◽  
W. G. J. H. M. van Sark ◽  
J. Bezemer
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Self Consistent ◽  
Radio Frequency Discharges

Excitation in radio-frequency discharges

1963 ◽  
Vol 19 (8) ◽  
pp. 1309-1317 ◽  
Author(s):  
R. Mavrodineanu ◽  
R.C. Hughes
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharges

Modeling of electronegative radio-frequency discharges

1991 ◽  
Vol 19 (2) ◽  
pp. 122-129 ◽  
Author(s):  
M. Meyyappan ◽  
T.R. Govindan
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharges
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