High‐Concentration Arsenic‐Doped Silicon Hydrogenated by Microwave Plasma

1998 ◽  
Vol 145 (3) ◽  
pp. 1026-1033 ◽  
Author(s):  
Katsuhiro Yokota ◽  
Kouichi Hosokawa ◽  
Kouichiro Terada ◽  
Kiyohito Hirai ◽  
Hiromichi Takano ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
High Concentration ◽  
Doped Silicon

ChemInform Abstract: High-Concentration Arsenic-Doped Silicon Hydrogenated by Microwave Plasma.

ChemInform ◽  
2010 ◽  
Vol 29 (21) ◽  
pp. no-no
Author(s):  
K. YOKOTA ◽  
K. HOSOKAWA ◽  
K. TERADA ◽  
K. HIRAI ◽  
H. TAKANO ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
High Concentration ◽  
Doped Silicon

scholarly journals VALIDASI METODE ANALISIS LOGAM Na, K, Mg dan Ca PADA AIR TUA (BITTERN) MENGGUNAKAN MICROWAVE PLASMA-ATOMIC EMISSION SPECTROMETER (MP-AES)

2016 ◽  
Vol 17 (3) ◽  
pp. 187
Author(s):  
Dian Septiani Pratama ◽  
Purna Pirdaus ◽  
Rinawati Rinawati ◽  
Sophia L. Sagala ◽  
Ifan Suhelmi R. Suhelmi
Keyword(s):  
Microwave Plasma ◽  
Matrix Effects ◽  
Atomic Emission ◽  
Inorganic Materials ◽  
Emission Spectrometry ◽  
Plasma Atomic Emission ◽  
High Concentration ◽  
True Value ◽  
Relative Standard ◽  
Atomic Emission Spectrometer

<p>Abstrak<br />Penelitian ini dilakukan untuk memperoleh metode analisis dan unjuk kerja metode analisis logam mayor (Na, K, Mg dan Ca) dalam air tua(bittern) menggunakan Microwave Plasma-Atomic Emission Spectrometer. Diketahui bahwa karakteristik air tua memiliki matriks kompleks yang disebabkan oleh tingginya mineral anorganik yang terkandung didalamnya. Oleh karenanya, metode analisis yang digunakan menerapkan larutan standar multi elemen mendekati matriks air tua. Karakteristik kinerja dari metode ini ditentukan dengan uji larutan standar multielement (Na, K, Mg dan Ca), dan unspiked sampel. Selektivitas, linearitas, akurasi, presisi, deteksi dan batas kuantifikasi dari hasil analisis yang diperoleh kemudian dievaluasi. Efek matriks yang signifikan tidak teridentifikasi untuk semua elemen yang dianalisis. Linearitas (r) metode analisis untuk elemen Na, K, Mg dan Ca berkisar antara 0,9955 - 0,9998. Hasil uji akurasi menunjukkan bahwa tidak ada penyimpangan dari nilai benar untuk semua elemen yang dianalisa. Presisi yang disajikan dalam relative standard deviation (%RSD) untuk analisa Na, K, Mg dan Ca berturut-turut adalah: 1,491; 2,702; 2,678; dan 1,923. Sedangkan batas deteksi untuk parameter Na, K, Mg, dan Ca berturut-turut adalah: 0,184; 0,070; 0,219 dan 0,005 mg/l dengan batas kuantifikasi 0,613; 0,230; 0,730 dan 0,017mg/l. Hasil validasi tersebut menunjukkan bahwa metode yang diusulkan selektif dan sesuai untuk untuk analisis air tua.<br />Kata kunci : validasi metode analisis, air tua, logam (Na, K, Mg, Ca), MP-AES.</p><p><br />Abstract<br />This research aims to obtain analysis method for mayor elements (Na, K, Mg, and Ca) in bittern using Microwave Plasma-Atomic Emission Spectrometry (MP-AES) and to assess the validity of the obtained method. It is known that sea bittern characteristic has complex matrix for its high concentration of the inorganic materials. Therefore assessment of the validity of the analytical method for mayor element is important. The performance characteristics of the method were established by multi-elements-standard-solution assay (Na, K, Mg and Ca), in which samples were un-spiked. Selectivity, linearity, accuracy, precision, detection and quantification limit of the method were evaluated in the study. Matrix effects were not significantly identified for the studied elements. Linearity of selected concentration range for Na, K, Mg and Ca varied from 0.9955- 0.9998. No deviation of true value for all elements was observed in the accuracy test. Meanwhile, precision values of the method (%RSD) were 1.491; 2.702; 2.678; and 1.923, respectively for Na, K, Mg and Ca. The method developed in the present study indicated the detection limits for Na, K, Mg and Ca were 0,184; 0,070; 0,219 dan 0,005 mg/l, respectively, with quantification limits of 0,613; 0,230; 0,730 dan 0,017mg/l. The results of the validation method showed that the proposed method is selective and feasible for sea bittern analysis using MP-AES. Keywords: Method validation, Bittern, Na, K, Mg, Ca, MP-AES.</p>

scholarly journals Metallic trace elements contained in the sediments of Dayet Er-Roumi Lake (Morocco)

2021 ◽  
Vol 298 ◽  
pp. 05004
Author(s):  
Sara El Ghizi ◽  
Sliman Hssaissoune ◽  
Mohammed El Bouch ◽  
Mohamed Sadik ◽  
Mustapha Hasnaoui
Keyword(s):  
Heavy Metals ◽  
Microwave Plasma ◽  
Winter Season ◽  
Contamination Factor ◽  
Atomic Emission ◽  
Fish Mortality ◽  
Toxic Heavy Metals ◽  
High Concentration ◽  
Metallic Trace Elements ◽  
Spatio Temporal

The contamination of aquatic ecosystems with metals remains a serious environmental problem of growing concern. Sediments are often studied as reservoirs or wells for many chemical pollutants. They are micropollutant traps; they also indicate the watercourse's historical pollution, lagoons, and lakes…Lake Dayet Er-Roumi (SIBE) is the only permanent natural lake in the Khemisset region (Morocco); this wetland is affected by several forms of pollution that are mainly linked to human activities (agricultural, domestic, industrial, etc.). The objective of our study is to contribute, through qualitative and quantitative analysis, to the assessment of lake sediment pollution by Spatio-temporal monitoring of certain toxic heavy metals such as Mn, Zn, Cr, Cd. These sediments are collected on the level of the lake's surface; the concentration of heavy metals was measured by microwave plasma atomic emission spectroscope (MP-AES). Metal analyses carried out at three measuring points during the winter season reveal a high concentration of Zn, Cr, and Mn at all stations during the winter season, which far exceeds the recommended standards, with a low level of Cd. The contamination factor "FC" and the degree of contamination "DC" reveal polymetallic contaminations dominated by two elements, zinc, and Chromium, which are the most worrying. These results clearly show that lake Dayet Er-Roumi is polluted; strategies to limit the lake's pollution must be implemented to avoid several ecological problems (fish mortality, etc.).

scholarly journals Formation of hydrogen-boron complexes in boron-doped silicon treated with a high concentration of hydrogen atoms

2005 ◽  
Vol 72 (24) ◽  
Author(s):  
N. Fukata ◽  
S. Fukuda ◽  
S. Sato ◽  
K. Ishioka ◽  
M. Kitajima ◽  
...  
Keyword(s):  
High Concentration ◽  
Hydrogen Atoms ◽  
Boron Doped ◽  
Doped Silicon ◽  
Boron Complexes

Enhanced Internal Gettering of Iron in n/n+ Epitaxial Silicon Wafer: Effect of High Temperature Rapid Thermal Annealing in Nitrogen Ambient

2015 ◽  
Vol 242 ◽  
pp. 218-223
Author(s):  
Peng Dong ◽  
Xing Bo Liang ◽  
Da Xi Tian ◽  
Xiang Yang Ma ◽  
De Ren Yang
Keyword(s):  
Silicon Wafer ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Silicon Wafers ◽  
Enhancement Effect ◽  
Epitaxial Silicon ◽  
High Concentration ◽  
Oxygen Precipitation ◽  
Doped Silicon ◽  
The One

We report a strategy feasible for improving the internal gettering (IG) capability of iron (Fe) for n/n+ epitaxial silicon wafers using the heavily arsenic (As)-doped Czochralski (CZ) silicon wafers as the substrates. The n/n+ epitaxial silicon wafers were subjected to the two-step anneal of 650 °C/16 h + 1000 °C/16 h following the rapid thermal processing (RTP) at 1250 °C in argon (Ar) or nitrogen (N2) atmosphere. It is found that the prior RTP in N2 atmosphere exhibits much stronger enhancement effect on oxygen precipitation (OP) in the substrates than that in Ar atmosphere, thereby leading to a better IG capability of Fe contamination on the epitaxial wafer. In comparison with the RTP in Ar atmosphere, the one in N2 atmosphere injects not only vacancies but also nitrogen atoms of high concentration into the heavily As-doped silicon substrate. The co-action of vacancy and nitrogen leads to the enhanced OP in the substrate and therefore the better IG capability for the n/n+ epitaxial silicon wafer.

Hydrogenation of High-Concentration Arsenic-Doped Silicon Using Radio Frequency Hydrogen Plasma

1997 ◽  
Vol 36 (Part 1, No. 7A) ◽  
pp. 4355-4358
Author(s):  
Katsuhiro Yokota ◽  
Kouichi Hosokawa ◽  
Kouichiro Terada ◽  
Kiyohito Hirai ◽  
Hiromichi Takano ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Hydrogen Plasma ◽  
High Concentration ◽  
Doped Silicon

Hydrogen–boron complexes in heavily boron-doped silicon treated with high concentration of hydrogen atoms

2006 ◽  
Vol 376-377 ◽  
pp. 85-88 ◽  
Author(s):  
N. Fukata ◽  
S. Fukuda ◽  
S. Sato ◽  
K. Ishioka ◽  
M. Kitajima ◽  
...  
Keyword(s):  
High Concentration ◽  
Hydrogen Atoms ◽  
Boron Doped ◽  
Doped Silicon ◽  
Boron Complexes

ENHANCED GROWTH OF CARBON NANOTUBES ON SELECTED AREA USING AN AQUEOUS CATALYST

2005 ◽  
Vol 04 (04) ◽  
pp. 431-436 ◽  
Author(s):  
J. T. H. TSAI ◽  
K. H. CHEN
Keyword(s):  
Carbon Nanotubes ◽  
Silicon Nitride ◽  
Silicon Surface ◽  
Microwave Plasma ◽  
Substrate Surface ◽  
High Concentration ◽  
Multi Wall Carbon Nanotubes ◽  
Selective Area ◽  
Silicon Trenches ◽  
Mixture Plasma

This paper describes the work carried out to produce patterned arrays of multi-wall carbon nanotubes (MWCNTs) using a liquid catalyst and a microwave plasma technique. By this method we can control the CNT growth on selective sites by engineering the substrate surface and yet maintain a very high CNT growth rate (~10 μm per minute). The catalyst is made by hydrochloric acid solution which contains high concentration of ferromagnetic metal ions. Upon dispersing the liquid catalyst on a silicon nitride substrate containing exposed silicon patterns, the catalyst only precipitates on the hydrophilic sites (i.e. silicon surface). After performing the CNT growth in a microwave reactor with CH 4/ N 2 mixture plasma, nanotubes can only be found to grow on exposed silicon surface instead of the main area covered by silicon nitride. This method allows us to produce multi-wall carbon nanotubes on the selective area as in the silicon trenches, concavities and thin film edges.

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