Electrical Characteristics of a WSi x Contact Electrode with a WSi x  N  Diffusion Barrier Formed by Using Electron Cyclotron Resonance Plasma Nitridation

1997 ◽  
Vol 144 (11) ◽  
pp. 3993-3998 ◽  
Author(s):  
A. Hirata ◽  
T. Hosoya ◽  
K. Machida ◽  
H. Kyuragi ◽  
H. Akiya
Keyword(s):  
Diffusion Barrier ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electrical Characteristics ◽  
Electron Cyclotron Resonance Plasma ◽  
Plasma Nitridation ◽  
Resonance Plasma ◽  
Contact Electrode

Preconditioning of c-plane sapphire for GaN molecular beam epitaxy by electron cyclotron resonance plasma nitridation

1998 ◽  
Vol 83 (11) ◽  
pp. 6023-6027 ◽  
Author(s):  
Christian Heinlein ◽  
Jostein K. Grepstad ◽  
Sven Einfeldt ◽  
Detlef Hommel ◽  
Torunn Berge ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Cyclotron Resonance ◽  
Molecular Beam ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Plasma Nitridation ◽  
Resonance Plasma
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