Trap density of GeNx/Ge interface fabricated by electron-cyclotron-resonance plasma nitridation

2011 ◽  
Vol 99 (2) ◽  
pp. 022902 ◽  
Author(s):  
Yukio Fukuda ◽  
Yohei Otani ◽  
Hiroshi Toyota ◽  
Toshiro Ono
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Trap Density ◽  
Electron Cyclotron Resonance Plasma ◽  
Plasma Nitridation ◽  
Resonance Plasma

Preconditioning of c-plane sapphire for GaN molecular beam epitaxy by electron cyclotron resonance plasma nitridation

1998 ◽  
Vol 83 (11) ◽  
pp. 6023-6027 ◽  
Author(s):  
Christian Heinlein ◽  
Jostein K. Grepstad ◽  
Sven Einfeldt ◽  
Detlef Hommel ◽  
Torunn Berge ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Cyclotron Resonance ◽  
Molecular Beam ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Plasma Nitridation ◽  
Resonance Plasma
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