A WSi x  N  Diffusion Barrier Formed with Electron Cyclotron Resonance Nitrogen Plasma

1996 ◽  
Vol 143 (11) ◽  
pp. 3747-3751 ◽  
Author(s):  
A. Hirata ◽  
T. Hosoya ◽  
K. Machida ◽  
H. Takaoka ◽  
H. Akiya
Keyword(s):  
Diffusion Barrier ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Nitrogen Plasma ◽  
Electron Cyclotron

ChemInform Abstract: A WSixN Diffusion Barrier Formed with Electron Cyclotron Resonance Nitrogen Plasma.

ChemInform ◽  
2010 ◽  
Vol 28 (12) ◽  
pp. no-no
Author(s):  
A. HIRATA ◽  
T. HOSOYA ◽  
K. MACHIDA ◽  
H. TAKAOKA ◽  
H. AKIYA
Keyword(s):  
Diffusion Barrier ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Nitrogen Plasma ◽  
Electron Cyclotron

scholarly journals Composition and bandgap control of AlxGa1−xN films synthesized by plasma-assisted pulsed laser deposition

2015 ◽  
Vol 3 (20) ◽  
pp. 5307-5315 ◽  
Author(s):  
Hua Cai ◽  
Peipei Liang ◽  
René Hübner ◽  
Shengqiang Zhou ◽  
Yanli Li ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Pulsed Laser ◽  
Nitrogen Plasma ◽  
Electron Cyclotron ◽  
Laser Deposition ◽  
Si Substrates

Ternary AlxGa1−xN films with different Al compositions were synthesized on sapphire and Si substrates by pulsed laser co-ablation of a polycrystalline GaAs target and a metallic Al target in nitrogen plasma generated by electron cyclotron resonance discharge of N2 gas.

XPS investigation of aluminum and silicon surfaces nitrided by a distributed electron cyclotron resonance nitrogen plasma

2001 ◽  
Vol 482-485 ◽  
pp. 220-226 ◽  
Author(s):  
N Duez ◽  
B Mutel ◽  
C Vivien ◽  
L Gengembre ◽  
P Goudmand ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Nitrogen Plasma ◽  
Electron Cyclotron ◽  
Silicon Surfaces
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