Optimization of hardness by the control of microwave power in TiN thin film deposited by electron cyclotron resonance assisted sputtering in a nitrogen plasma

1999 ◽  
Vol 17 (5) ◽  
pp. 2535-2541 ◽  
Author(s):  
Carl Carney ◽  
Delcie Durham
Keyword(s):  
Thin Film ◽  
Microwave Power ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Nitrogen Plasma ◽  
Electron Cyclotron

Low Temperature Silicon Oxidation With Electron Cyclotron Resonance Oxygen Plasma

1991 ◽  
Vol 235 ◽  
Author(s):  
K. T. Sung ◽  
S. W. Pang
Keyword(s):  
Low Temperature ◽  
Microwave Power ◽  
Cyclotron Resonance ◽  
Oxygen Plasma ◽  
Permanent Magnets ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Rf Power ◽  
Source Distance ◽  
Ecr Source

ABSTRACTSilicon was oxidized at low temperature with an oxygen plasma generated by an electron cyclotron resonance (ECR) source. The ECR source utilized a multicusp magnetic field formed by permanent magnets. Microwave power at 2.45 GHz was applied to the source and if power at 13.56 MHz was applied to the sample stage. Si oxidation was studied as a function of source distance, pressure, microwave power, and rf power. The oxide thickness increases with microwave and rf power but decreases with source distance. The oxidation rate increases with pressure up to 12 mTorr, men decreases at higher pressure. The relative emission intensities in the plasma monitored using optical emission spectroscopy showed similar dependence on the source distance and microwave power. Oxidation temperature was estimated to be <100°C. Using ellipsometry and X-ray photoelectron spectroscopy, the oxidized films were found to be close to that of thermal oxide with refractive index at 1.45 and oxygen to silicon ratio of 2. From the current-voltage and capacitance-voltage measurements, the breakdown fields of these oxide films were 6.3 MV/cm and the fixed charge densities were 7×1010 cm−2.

Hydrogen Passivation of Polysilicon Thin-Film Transistors by Electron Cyclotron Resonance Plasma

1993 ◽  
Vol 32 (Part 1, No. 6A) ◽  
pp. 2601-2606 ◽  
Author(s):  
Kris Baert ◽  
Hiroyuki Murai ◽  
Kazuhiro Kobayashi ◽  
Hirofumi Namizaki ◽  
Masahiro Nunoshita
Keyword(s):  
Thin Film ◽  
Cyclotron Resonance ◽  
Thin Film Transistors ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Hydrogen Passivation ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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