Theoretical study of GaN molecular beam epitaxy growth using electron cyclotron resonance nitrogen plasma

2001 ◽  
Vol 19 (5) ◽  
pp. 1803
Author(s):  
Wenning Fu ◽  
Rama Venkat ◽  
M. Meyyappan
Keyword(s):  
Molecular Beam Epitaxy ◽  
Cyclotron Resonance ◽  
Molecular Beam ◽  
Electron Cyclotron Resonance ◽  
Theoretical Study ◽  
Nitrogen Plasma ◽  
Electron Cyclotron ◽  
Molecular Beam Epitaxy Growth

Epitaxial Growth of GaN on Sapphire (0001) Substrates by Electron Cyclotron Resonance Molecular Beam Epitaxy

1995 ◽  
Vol 34 (Part 2, No. 2B) ◽  
pp. L236-L239 ◽  
Author(s):  
Sung Hwan Cho ◽  
Hirosi Sakamoto ◽  
Katsuhiro Akimoto ◽  
Yoshitaka Okada ◽  
Mitsuo Kawabe
Keyword(s):  
Molecular Beam Epitaxy ◽  
Epitaxial Growth ◽  
Cyclotron Resonance ◽  
Molecular Beam ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron
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