Estimation of Fractional Surface Coverage of Particles for Oxide CMP
2004 ◽
Vol 151
(5)
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pp. G368
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2010 ◽
Vol 84
(8)
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pp. 1035-1043
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1971 ◽
Vol 321
(1544)
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pp. 53-68
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1990 ◽
Vol 48
(4)
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pp. 1094-1095
1991 ◽
Vol 65
(02)
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pp. 202-205
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1982 ◽
Vol 47
(11)
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pp. 2996-3003
2005 ◽
Vol 70
(12)
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pp. 2027-2037
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