scholarly journals Highly Conformal Cu Thin-Film Growth by Low-Temperature Pulsed MOCVD

2003 ◽  
Vol 6 (8) ◽  
pp. C106 ◽  
Author(s):  
Kwansoo Kim ◽  
Kijung Yong
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Film Growth ◽  
Thin Film Growth ◽  
Cu Thin Film

scholarly journals Low Temperature Epitaxial Barium Titanate Thin Film Growth in High Vacuum CVD

2017 ◽  
Vol 4 (18) ◽  
pp. 1700116 ◽  
Author(s):  
Michael Reinke ◽  
Yury Kuzminykh ◽  
Felix Eltes ◽  
Stefan Abel ◽  
Thomas LaGrange ◽  
...  
Keyword(s):  
Thin Film ◽  
Barium Titanate ◽  
Low Temperature ◽  
Film Growth ◽  
High Vacuum ◽  
Thin Film Growth ◽  
Barium Titanate Thin Film ◽  
Titanate Thin Film

Effect of hydrogen atmosphere in Cu thin film growth by chemical vapor deposition using Cu(dmamb)2

2012 ◽  
Vol 89 ◽  
pp. 109-115 ◽  
Author(s):  
Jong Mun Choi ◽  
Dohan Lee ◽  
Ji Hun Park ◽  
Chang Gyoun Kim ◽  
Taek-Mo Chung ◽  
...  
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Film Growth ◽  
Chemical Vapor ◽  
Hydrogen Atmosphere ◽  
Thin Film Growth ◽  
Cu Thin Film

Low-temperature laser-CVD thin film growth of SiC from Si2H6 and C2H2

2003 ◽  
Vol 258 (3-4) ◽  
pp. 272-276 ◽  
Author(s):  
A Santoni ◽  
J Lancok ◽  
S Loreti ◽  
I Menicucci ◽  
C Minarini ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Film Growth ◽  
Thin Film Growth ◽  
Laser Cvd

Influence of an Accelerator in Cu Thin-film Growth by Potentiostat Electrodeposition

2011 ◽  
Vol 58 (5(2)) ◽  
pp. 1527-1531 ◽  
Author(s):  
Youn-Seoung Lee ◽  
Yong-Hyuk Lee ◽  
Hyunjin Ju ◽  
Sa-Kyun Rha ◽  
Byoungju Kang ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth ◽  
Cu Thin Film
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