Metallorganic Chemical Vapor Deposition of TaO[sub x]N[sub y] as a High-Dielectric-Constant Material for Next-Generation Devices

2002 ◽  
Vol 149 (10) ◽  
pp. C529 ◽  
Author(s):  
Sung-Lae Cho ◽  
Byung-Sung Kim ◽  
Hyun-Mi Kim ◽  
In Kyu Chun ◽  
Ki-Bum Kim
Keyword(s):  
Dielectric Constant ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
High Dielectric Constant ◽  
Chemical Vapor ◽  
Next Generation ◽  
High Dielectric

Flexible and Transparent Dielectric Film with a High Dielectric Constant Using Chemical Vapor Deposition-Grown Graphene Interlayer

ACS Nano ◽  
2013 ◽  
Vol 8 (1) ◽  
pp. 269-274 ◽  
Author(s):  
Jin-Young Kim ◽  
Jongho Lee ◽  
Wi Hyoung Lee ◽  
Iskandar N. Kholmanov ◽  
Ji Won Suk ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
High Dielectric Constant ◽  
Dielectric Film ◽  
Chemical Vapor ◽  
Transparent Dielectric ◽  
Grown Graphene ◽  
High Dielectric

High dielectric constant and low loss of polymeric dielectric composites filled by carbon nanotubes adhering BaTiO3 hybrid particles

RSC Advances ◽  
2015 ◽  
Vol 5 (37) ◽  
pp. 29017-29021 ◽  
Author(s):  
Z. D. Liu ◽  
Y. Feng ◽  
W. L. Li
Keyword(s):  
Carbon Nanotubes ◽  
Dielectric Constant ◽  
Chemical Vapor Deposition ◽  
Polymer Composites ◽  
Vapor Deposition ◽  
High Dielectric Constant ◽  
Chemical Vapor ◽  
Hybrid Particles ◽  
Low Loss ◽  
High Dielectric

We reported the preparation of carbon nanotubes adhering BaTiO3 nanoparticles (BT@CNTs) via chemical vapor deposition (CVD) and the method to obtain the polymer composites with high dielectric constant and low loss.

Plasma Enhanced Chemical Vapor Deposition of Porous Organosilicate Glass ILD Films With k ≤ 2.4.

2003 ◽  
Vol 766 ◽  
Author(s):  
Raymond N. Vrtis ◽  
Mark L. O'Neill ◽  
Jean L. Vincent ◽  
Aaron S. Lukas ◽  
Brian K. Peterson ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Chemical Vapor Deposition ◽  
Mechanical Strength ◽  
Thermal Annealing ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organosilicate Glass

AbstractWe report on our work to develop a process for depositing nanoporous organosilicate (OSG) films via plasma enhanced chemical vapor deposition (PECVD). This approach entails codepositing an OSG material with a plasma polymerizable hydrocarbon, followed by thermal annealing of the material to remove the porogen, leaving an OSG matrix with nano-sized voids. The dielectric constant of the final film is controlled by varying the ratio of porogen precursor to OSG precursor in the delivery gas. Because of the need to maintain the mechanical strength of the final material, diethoxymethylsilane (DEMS) is utilized as the OSG precursor. Utilizing this route we are able to deposit films with a dielectric constant of 2.55 to 2.20 and hardness of 0.7 to 0.3 GPa, respectively.

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