Deposition of high dielectric constant materials by dual spectral sources assisted metalorganic chemical vapor deposition
2008 ◽
1998 ◽
Vol 125
(1)
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pp. 47-54
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2002 ◽
Vol 149
(10)
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pp. C529
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1995 ◽
Vol 90
(1)
◽
pp. 75-80
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