Heteroepitaxial Growth of Yttria‐Stabilized Zirconia on Silicon (100) by Reactive Sputtering with an Electron Cyclotron Resonance Source

1999 ◽  
Vol 146 (4) ◽  
pp. 1500-1504 ◽  
Author(s):  
J. Lillé ◽  
W. J. Varhue ◽  
Stephen Mongeon
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Reactive Sputtering ◽  
Electron Cyclotron ◽  
Yttria Stabilized Zirconia ◽  
Heteroepitaxial Growth ◽  
Stabilized Zirconia

Heteroepitaxial Growth of Yttria-Stabilized Zirconia Film on Silicon by Reactive Sputtering

1995 ◽  
Vol 34 (Part 1, No. 4A) ◽  
pp. 1942-1946 ◽  
Author(s):  
Susumu Horita ◽  
Masakazu Murakawa ◽  
\ast ◽  
Takaharu Fujiyama ◽  
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Keyword(s):  
Reactive Sputtering ◽  
Yttria Stabilized Zirconia ◽  
Heteroepitaxial Growth ◽  
Stabilized Zirconia ◽  
Zirconia Film

Long Electron Cyclotron Resonance Plasma Source for Reactive Sputtering

1996 ◽  
Vol 35 (Part 1, No. 10) ◽  
pp. 5495-5500 ◽  
Author(s):  
Toshiaki Yasui ◽  
Kiyotaka Nakase ◽  
Hirokazu Tahara ◽  
Takao Yoshikawa
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Reactive Sputtering ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Ion Bombardment Effects on Boron Nitride Film Synthesis by Reactive Sputtering with Electron Cyclotron Resonance Plasmas

1999 ◽  
Vol 38 (Part 1, No. 7B) ◽  
pp. 4515-4519 ◽  
Author(s):  
Masayuki Wakatsuchi ◽  
Yoshiro Takaba ◽  
Kumiko \scshapeKanai ◽  
Yoshio Ueda ◽  
Masahiro Nishikawa
Keyword(s):  
Boron Nitride ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Bombardment ◽  
Reactive Sputtering ◽  
Electron Cyclotron ◽  
Nitride Film ◽  
Film Synthesis
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