scholarly journals Effects of Ion Irradiation on Formation of TiO2 Thin Films by Reactive Sputtering in Electron Cyclotron Resonance Plasma Source.

Shinku ◽  
2001 ◽  
Vol 44 (7) ◽  
pp. 661-666 ◽  
Author(s):  
Shinji SUGIHARA ◽  
Eiji HONBO ◽  
Yushi KATO ◽  
Shigeyuki ISHII
Keyword(s):  
Thin Films ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Irradiation ◽  
Reactive Sputtering ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Tio2 Thin Films ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Long Electron Cyclotron Resonance Plasma Source for Reactive Sputtering

1996 ◽  
Vol 35 (Part 1, No. 10) ◽  
pp. 5495-5500 ◽  
Author(s):  
Toshiaki Yasui ◽  
Kiyotaka Nakase ◽  
Hirokazu Tahara ◽  
Takao Yoshikawa
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Reactive Sputtering ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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