A Novel Backside Gate Structure to Improve Device Performance

2015 ◽  
Vol 66 (1) ◽  
pp. 185-190
Author(s):  
Y.-H. Hwang ◽  
W. Zhu ◽  
C. Dong ◽  
S. Ahn ◽  
F. Ren ◽  
...  
1988 ◽  
Vol 144 ◽  
Author(s):  
Jesús A. del Alamo ◽  
Takashi Mizutani

ABSTRACTScaling of the In0.52Al0.48As insulator thickness of In0.52Al0.48As/n+-In0.53Ga0.47As MIStype FET's is experimentally found to result in a drastic drop of performance below 200 Å. This is demonstrated to arise from an increase in the sheet resistance of the extrinsic portions of the device that accompanies insulator scaling. In order to solve this problem, a recessed-gate dopedchannel MISFET with a very thin (300 Å) n+-In0.53Ga0.47As cap layer has been fabricated. A 1.5 μm long gate device showed a transconductance of 285 mS/mm and a current-gain cut-off frequency of 19.4 GHz. This result proves the ability of a thin n+-In0.53Ga0.47As cap to reduce source resistance and improve device performance. The fabricated recessed-gate structure is a promising candidate for high-performance scaled MIS-type FET's based on thin, heavily-doped In0.53Gav0.47 As channels.


2006 ◽  
Vol 913 ◽  
Author(s):  
Young Way Teh ◽  
John Sudijono ◽  
Alok Jain ◽  
Shankar Venkataraman ◽  
Sunder Thirupapuliyur ◽  
...  

AbstractThis work focuses on the development and physical characteristics of a novel dielectric film for a pre-metal dielectric (PMD) application which induces a significant degree of tensile stress in the channel of a sub-65nm node CMOS structure. The film can be deposited at low temperatures to meet the requirements of NiSi integration while maintaining void-free gap fill and superior film quality such as moisture content and uniformity. A manufacturable and highly reliable oxide film has been demonstrated through both TCAD simulation and real device data, showing ~6% NMOS Ion-Ioff improvement; no Ion-Ioff improvement or degradation on PMOS. A new concept has been proposed to explain the PMD strain effect on device performance improvement. Improvement in Hot Carrier immunity is observed compared to similar existing technologies using high density plasma (HDP) deposition techniques.


Materials ◽  
2022 ◽  
Vol 15 (2) ◽  
pp. 654
Author(s):  
Shouyi Wang ◽  
Qi Zhou ◽  
Kuangli Chen ◽  
Pengxiang Bai ◽  
Jinghai Wang ◽  
...  

In this work, novel hybrid gate Ultra-Thin-Barrier HEMTs (HG-UTB HEMTs) featuring a wide modulation range of threshold voltages (VTH) are proposed. The hybrid gate structure consists of a p-GaN gate part and a MIS-gate part. Due to the depletion effect assisted by the p-GaN gate part, the VTH of HG-UTB HEMTs can be significantly increased. By tailoring the hole concentration of the p-GaN gate, the VTH can be flexibly modulated from 1.63 V to 3.84 V. Moreover, the MIS-gate part enables the effective reduction in the electric field (E-field) peak at the drain-side edge of the p-GaN gate, which reduces the potential gate degradation originating from the high E-field in the p-GaN gate. Meanwhile, the HG-UTB HEMTs exhibit a maximum drain current as high as 701 mA/mm and correspond to an on-resistance of 10.1 Ω mm and a breakdown voltage of 610 V. The proposed HG-UTB HEMTs are a potential means to achieve normally off GaN HEMTs with a promising device performance and featuring a flexible VTH modulation range, which is of great interest for versatile power applications.


2018 ◽  
Vol 11 (9) ◽  
pp. 2353-2362 ◽  
Author(s):  
Efat Jokar ◽  
Cheng-Hsun Chien ◽  
Amir Fathi ◽  
Mohammad Rameez ◽  
Yu-Hao Chang ◽  
...  

Ethylenediammonium diiodide (EDAI2) served as an effective additive for tin-based perovskite solar cells to attain a power conversion efficiency approaching 9%.


1999 ◽  
Vol 5 (S2) ◽  
pp. 754-755
Author(s):  
Lawrence K Lam ◽  
Nan Jiang ◽  
Dieter G Ast ◽  
John Silcox

Recently there has been increasing interest in nickel induced lateral recrystallization of amorphous silicon because of its potential to improve device performance and to lower the thermal budget during processing. The hypothesis is that the formation of nickel silicide provides a low energy nucleus for the recrystallization of amorphous silicon. The silicide, moving into a-Si, leaves crystalline silicon behind.1 The grains formed, therefore, tend to elongated. In this paper, we attempt to use TEM to investigate in detail the nickel assisted lateral crystallization of amorphous silicon. The sample was prepared by first depositing a 1000A thick low temperature, oxide layer, LTO, on Corning 1737 glass. A 1000A thick amorphous silicon layer, a-Si, and 1000A thick a-Si were deposited subsequently. The sample was pattern and etched with hydrofluoric acid to form lOum x lOum holes in the oxide layer. Next, 200A of nickel was evaporated onto the sample, followed by a 600°C, 6 hours anneal to induce lateral recrystallization.


2014 ◽  
Vol 778-780 ◽  
pp. 1197-1200
Author(s):  
Masato Hori ◽  
Yuki Asai ◽  
Masashi Yoneoka ◽  
Isao Tsunoda ◽  
Kenichiro Takakura ◽  
...  

To solve the problem of the limitation to improve device performance in standard Si integration technologies and to develop radiation-harsh devices, the irradiation effects of Si1-xCx source/drain (S/D) n-type metal oxide semiconductor field effect transistors (n-MOSFETs) have been investigated. It is shown that the drain current and the maximum electron mobility of Si1-xCx n-MOSFETs decrease by electron irradiation. The reduction of the device performance can be explained by the radiation-induced lattice defects in the devices. However, the electron mobility enhancement effect by adding C remained after an electron irradiation up to 5×1017 e/cm2.


2014 ◽  
Vol 105 (8) ◽  
pp. 083905 ◽  
Author(s):  
Meiying Leng ◽  
Miao Luo ◽  
Chao Chen ◽  
Sikai Qin ◽  
Jie Chen ◽  
...  

limited by scaling challenges of CMOS devices, the option to improve device performance is to look for novel materials and devices. Carbon, Carbon nanotubes (CNT) and graphene are prominent contenders for substituting silicon in near future. Graphene nanoribbon (GNR) which share many of the fascinating electrical and mechanical properties of CNT are a suitable device material because of compatibility with lithography process. A double gate GNRFET is simulated by solving quantum transport equation with self-consistent electrostatics, while incorporating non-parabolic band structure of GNRFET. Non equilibrium Green’s function (NEGF) approach is used for device simulation. This paper provides physical modeling of GNRFET and investigates the device characteristics and performance for different families of GNRs as well as for different GNR widths.


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