Highly Reliable Ring-Type Contact for High-Density Phase Change Memory

2006 ◽  
Vol 45 (4B) ◽  
pp. 3233-3237 ◽  
Author(s):  
Chang-Wook Jeong ◽  
Su-Jin Ahn ◽  
Young-Nam Hwang ◽  
Yoon-Jong Song ◽  
Jae-Hee Oh ◽  
...  
Keyword(s):  
Phase Change ◽  
Phase Change Memory ◽  
High Density ◽  
Ring Type ◽  
Type Contact ◽  
Change Memory

scholarly journals Ultra High Density Scanning Electrical Probe Phase-Change Memory for Archival Storage

2011 ◽  
Vol 50 (9S1) ◽  
pp. 09MD04 ◽  
Author(s):  
Lei Wang ◽  
C. David Wright ◽  
Purav Shah ◽  
Mustafa M. Aziz ◽  
Abu Sebastian ◽  
...  
Keyword(s):  
Phase Change ◽  
Phase Change Memory ◽  
High Density ◽  
Archival Storage ◽  
Electrical Probe ◽  
Change Memory

Design of Side Bottom-Electrode-Contact for High Density Phase-Change Memory Array

2012 ◽  
Vol 12 (10) ◽  
pp. 7939-7943
Author(s):  
Yan Liu ◽  
Zhitang Song ◽  
Bo Liu ◽  
Jia Xu ◽  
Houpeng Chen ◽  
...  
Keyword(s):  
Phase Change ◽  
Bottom Electrode ◽  
Phase Change Memory ◽  
High Density ◽  
Memory Array ◽  
Electrode Contact ◽  
Change Memory

Dry Etching of Nanosized Ge1Sb2Te4 Patterns Using TiN Hard Mask for High Density Phase-Change Memory

2009 ◽  
Vol 9 (2) ◽  
pp. 1526-1529 ◽  
Author(s):  
Gaoming Feng ◽  
Bo Liu ◽  
Zhitang Song ◽  
Shilong Lv ◽  
Liangcai Wu ◽  
...  
Keyword(s):  
Phase Change ◽  
Phase Change Memory ◽  
Dry Etching ◽  
High Density ◽  
Hard Mask ◽  
Change Memory

scholarly journals Ultra High Density Scanning Electrical Probe Phase-Change Memory for Archival Storage

2011 ◽  
Vol 50 (9) ◽  
pp. 09MD04
Author(s):  
Lei Wang ◽  
C. David Wright ◽  
Purav Shah ◽  
Mustafa M. Aziz ◽  
Abu Sebastian ◽  
...  
Keyword(s):  
Phase Change ◽  
Phase Change Memory ◽  
High Density ◽  
Archival Storage ◽  
Electrical Probe ◽  
Change Memory

1T2R Structure with Cross-Spacer for High-Density Phase Change Memory

2008 ◽  
Author(s):  
Chain-Ming Lee ◽  
Chih-Wei Chen ◽  
Wei-Su Chen ◽  
Der-Sheng Chao ◽  
Ming-Jung Chen ◽  
...  
Keyword(s):  
Phase Change ◽  
Phase Change Memory ◽  
High Density ◽  
Change Memory

Full Integration of Highly Reliable Phase Change Memory With Advanced Ring Type Bottom Electrode Contact

2007 ◽  
Vol 90 (1) ◽  
pp. 88-94 ◽  
Author(s):  
J. M. SHIN ◽  
Y. J. SONG ◽  
D. W. KANG ◽  
C. W. JEONG ◽  
K. C. RYOO ◽  
...  
Keyword(s):  
Phase Change ◽  
Bottom Electrode ◽  
Phase Change Memory ◽  
Ring Type ◽  
Electrode Contact ◽  
Change Memory
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