Al/AlN/InP Metal-Insulator-Semiconductor-Diode Characteristics with Amorphous AlN Films Deposited by Electron-Cyclotron-Resonance Sputtering

Kunio Saito; Toshiro Ono; Masaru Shimada; Naoteru Shigekawa; Takatomo Enoki

doi:10.1143/jjap.44.334

Al/AlN/InP Metal-Insulator-Semiconductor-Diode Characteristics with Amorphous AlN Films Deposited by Electron-Cyclotron-Resonance Sputtering

Japanese Journal of Applied Physics ◽

10.1143/jjap.44.334 ◽

2005 ◽

Vol 44 (1A) ◽

pp. 334-342 ◽

Cited By ~ 11

Author(s):

Kunio Saito ◽

Toshiro Ono ◽

Masaru Shimada ◽

Naoteru Shigekawa ◽

Takatomo Enoki

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Semiconductor Diode ◽

Metal Insulator ◽

Metal Insulator Semiconductor

Download Full-text

Good quality Al/SiNx:H/InP metal-insulator-semiconductor devices obtained with electron cyclotron resonance plasma method

Journal of Applied Physics ◽

10.1063/1.366647 ◽

1998 ◽

Vol 83 (1) ◽

pp. 600-603 ◽

Cited By ~ 12

Author(s):

S. Garcia ◽

I. Mártil ◽

G. Gonzalez Diaz ◽

E. Castan ◽

S. Dueñas ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Semiconductor Devices ◽

Electron Cyclotron ◽

Metal Insulator ◽

Electron Cyclotron Resonance Plasma ◽

Metal Insulator Semiconductor ◽

Plasma Method ◽

Resonance Plasma

Download Full-text

Electrical characterization of electron cyclotron resonance deposited silicon nitride dual layer for enhanced Al/SiNx:H/InP metal–insulator–semiconductor structures fabrication

Journal of Applied Physics ◽

10.1063/1.371774 ◽

1999 ◽

Vol 86 (12) ◽

pp. 6924-6930 ◽

Cited By ~ 4

Author(s):

R. Peláez ◽

E. Castán ◽

S. Dueñas ◽

J. Barbolla ◽

E. Redondo ◽

...

Keyword(s):

Silicon Nitride ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electrical Characterization ◽

Electron Cyclotron ◽

Metal Insulator ◽

Metal Insulator Semiconductor ◽

Semiconductor Structures

Download Full-text

Metal–Oxide–Semiconductor-Diode Characteristics with SiO2Films Formed by Oxidation and Sputtering Using Electron-Cyclotron-Resonance-Plasma Stream

Japanese Journal of Applied Physics ◽

10.1143/jjap.44.1031 ◽

2005 ◽

Vol 44 (2) ◽

pp. 1031-1036

Author(s):

Kunio Saito ◽

Yoshito Jin ◽

Toshiro Ono ◽

Masaru Shimada

Keyword(s):

Metal Oxide ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Metal Oxide Semiconductor ◽

Electron Cyclotron ◽

Oxide Semiconductor ◽

Semiconductor Diode ◽

Plasma Stream ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

Metal–insulator–metal capacitors by using electron cyclotron resonance plasma-SiO2

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.588125 ◽

1995 ◽

Vol 13 (5) ◽

pp. 2013 ◽

Cited By ~ 3

Author(s):

K. Machida

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Metal Insulator ◽

Electron Cyclotron Resonance Plasma ◽

Metal Insulator Metal ◽

Resonance Plasma

Download Full-text

Fabrication of Ta2O5∕GeNx gate insulator stack for Ge metal-insulator-semiconductor structures by electron-cyclotron-resonance plasma nitridation and sputtering deposition techniques

Applied Physics Letters ◽

10.1063/1.2720345 ◽

2007 ◽

Vol 90 (14) ◽

pp. 142114 ◽

Cited By ~ 16

Author(s):

Yohei Otani ◽

Yasuhiro Itayama ◽

Takuo Tanaka ◽

Yukio Fukuda ◽

Hiroshi Toyota ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Gate Insulator ◽

Metal Insulator ◽

Metal Insulator Semiconductor ◽

Sputtering Deposition ◽

Plasma Nitridation ◽

Semiconductor Structures ◽

Deposition Techniques ◽

Resonance Plasma

Download Full-text

Characterization of Metal Insulator Metal Electrical Properties of Electron Cyclotron Resonance Plasma Deposited Ta2O5

Japanese Journal of Applied Physics ◽

10.1143/jjap.45.7345 ◽

2006 ◽

Vol 45 (9B) ◽

pp. 7345-7350 ◽

Cited By ~ 13

Author(s):

Toshiro Ono ◽

Koji Kato ◽

Hiroshi Toyota ◽

Yukio Fukuda ◽

Yoshito Jin

Keyword(s):

Electrical Properties ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Metal Insulator ◽

Electron Cyclotron Resonance Plasma ◽

Metal Insulator Metal ◽

Resonance Plasma

Download Full-text

CALIBRATION OF HIGH MAGNETIC FIELDS USING FREE ELECTRON CYCLOTRON RESONANCE IN A PLASMA

Le Journal de Physique Colloques ◽

10.1051/jphyscol:19841196 ◽

1984 ◽

Vol 45 (C1) ◽

pp. C1-961-C1-963

Author(s):

J. C. Maan ◽

H.-J. Schneider Muntau ◽

A. Dorelon

Keyword(s):

Magnetic Fields ◽

Free Electron ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

High Magnetic Fields

Download Full-text

MBE grown Npn AlGaAs/GaAs bipolar transistors with C p doping by electron cyclotron resonance source activated methane

Electronics Letters ◽

10.1049/el:19910293 ◽

1991 ◽

Vol 27 (5) ◽

pp. 465 ◽

Cited By ~ 1

Author(s):

G. Liu ◽

D. Mui ◽

S. Fang ◽

G. Gao ◽

H. Morkoç

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Bipolar Transistors ◽

Electron Cyclotron

Download Full-text

Anisotropic electron cyclotron resonance etching of tungsten films on GaAs

Electronics Letters ◽

10.1049/el:19940006 ◽

1994 ◽

Vol 30 (1) ◽

pp. 84-85 ◽

Cited By ~ 4

Author(s):

R.J. Shul ◽

D.J. Rieger ◽

C. Constantine ◽

A.G. Baca ◽

C. Barratt

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron

Download Full-text

Characterization and optimization of electron cyclotron resonance ion source

IET-UK International Conference on Information and Communication Technology in Electrical Sciences (ICTES 2007) ◽

10.1049/ic:20070703 ◽

2007 ◽

Author(s):

R. Henry

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron

Download Full-text