Reactive Ion Etching of Al Alloy Films in a Rotating Magnetic Field

1993 ◽  
Vol 32 (Part 1, No. 2) ◽  
pp. 747-752
Author(s):  
Masafumi Tanabe ◽  
Akio Matsuda ◽  
Takeshi Sunada ◽  
Hideki Fujimoto ◽  
Toshio Hayashi
Keyword(s):  
Magnetic Field ◽  
Reactive Ion Etching ◽  
Rotating Magnetic Field ◽  
Al Alloy ◽  
Ion Etching ◽  
Alloy Films

Reactive ion etching of Al alloy and silicon dioxide films in a rotating magnetic field

1994 ◽  
Author(s):  
Masafumi Tanabe ◽  
Akio Matsuda ◽  
Takeshi Sunada ◽  
Taro Nomura ◽  
Hideki Fujimoto ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Silicon Dioxide ◽  
Reactive Ion Etching ◽  
Rotating Magnetic Field ◽  
Al Alloy ◽  
Ion Etching ◽  
Silicon Dioxide Films

Reactive ion etching of Fe-Si-Al alloy for thin film head

1991 ◽  
Vol 27 (6) ◽  
pp. 4888-4890 ◽  
Author(s):  
K. Kinoshita ◽  
K. Yamada ◽  
H. Matsutera
Keyword(s):  
Thin Film ◽  
Reactive Ion Etching ◽  
Al Alloy ◽  
Ion Etching

Magnetic field-assisted finishing for micropore X-ray focusing mirrors fabricated by deep reactive ion etching

CIRP Annals ◽  
2010 ◽  
Vol 59 (1) ◽  
pp. 351-354 ◽  
Author(s):  
H. Yamaguchi ◽  
R.E. Riveros ◽  
I. Mitsuishi ◽  
U. Takagi ◽  
Y. Ezoe ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
X Ray

Magnetic Ceramic Films from a Metallopolymer Resist Using Reactive Ion Etching in a Secondary Magnetic Field

2004 ◽  
Vol 16 (4) ◽  
pp. 291-296 ◽  
Author(s):  
S. B. Clendenning ◽  
S. Han ◽  
N. Coombs ◽  
C. Paquet ◽  
M. S. Rayat ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Ceramic Films

Influence of rotating magnetic field on the microstructure and phase content of Ni–Al alloy

2011 ◽  
Vol 509 (14) ◽  
pp. 4835-4838 ◽  
Author(s):  
Fudong Bai ◽  
Minghong Sha ◽  
Tingju Li ◽  
Lianhai Lu
Keyword(s):  
Magnetic Field ◽  
Rotating Magnetic Field ◽  
Al Alloy ◽  
Phase Content

Charge Build-Up and Uniformity Control in Magnetically Enhanced Reactive Ion Etching Using a Curved Lateral Magnetic Field

1994 ◽  
Vol 33 (Part 1, No. 4B) ◽  
pp. 2194-2199 ◽  
Author(s):  
Satoshi Nakagawa ◽  
Tomoyuki Sasaki ◽  
Hajime Mori ◽  
Takashi Namura
Keyword(s):  
Magnetic Field ◽  
Reactive Ion Etching ◽  
Ion Etching
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