High sensitive MEMS directional sound sensor with comb finger capacitor electronic readout

2015 ◽  
Vol 138 (3) ◽  
pp. 1768-1768 ◽  
Author(s):  
Daniel Wilmott ◽  
Fabio Alves ◽  
Gamani Karunasiri
Keyword(s):  
Comb Finger

Vertical comb-finger capacitive actuation and sensing for CMOS-MEMS

2002 ◽  
Vol 95 (2-3) ◽  
pp. 212-221 ◽  
Author(s):  
Huikai Xie ◽  
Gary K. Fedder
Keyword(s):  
Comb Finger ◽  
Cmos Mems

scholarly journals Characterization of Capacitive Comb-finger MEMS Accelerometers

2015 ◽  
Vol 4 (4) ◽  
Author(s):  
Aaditi Joshi ◽  
Sangram Redkar ◽  
Thomas Sugar
Keyword(s):  
Comb Finger ◽  
Mems Accelerometers

Tolerance Analysis of Comb-Driving Double Ended Tuning Fork Resonator Fabricated by DRIE Technology

2014 ◽  
Vol 609-610 ◽  
pp. 1375-1380
Author(s):  
Rui Li Meng ◽  
Hong Qun Zhang ◽  
Heng Liu
Keyword(s):  
Resonance Frequency ◽  
Electrostatic Force ◽  
Tolerance Analysis ◽  
Design Stage ◽  
Positive Slope ◽  
Mechanical Stiffness ◽  
Lateral Direction ◽  
Deep Reactive Ion Etching ◽  
Comb Finger ◽  
Fabrication Tolerances

Deep reactive ion etching (DRIE) process is specially invented for bulk micromachining fabrication with the objective of realizing high aspect ratio microstructures. However, various tolerances, such as slanted etched profile, uneven deep beams and undercut, cannot be avoided during the fabrication process. In this paper, the slanted etched profile fabrication tolerance with its effect on the performances of lateral comb-driving resonator, in terms of electrostatic force, mechanical stiffness, and resonance frequency, are discussed. It shows that comb finger with positive slope generates larger electrostatic force. The mechanical stiffness along lateral direction increases when the suspended beam slants negatively. The resonance frequency is 1.116 times larger if the comb finger and beam are tapered to -20and + 20, respectively. These analytical results can be used to compensate the fabrication tolerances at design stage and allow the resonator to provide more predictable performance.

A Microactuator for a High-Density Hard Disk Drive

2000 ◽  
Author(s):  
Dong-Woo Cho ◽  
Jong-Young Kim ◽  
Sang-Jo Lee ◽  
Ji-Whang Park ◽  
Seok-Moon Choi ◽  
...  
Keyword(s):  
Mechanical System ◽  
Natural Frequency ◽  
Hard Disk Drive ◽  
Driving Force ◽  
Parallel Plate ◽  
Disk Drive ◽  
Micro Electro Mechanical System ◽  
Comb Finger ◽  
Dual Stage ◽  
Vector Sum

Abstract This paper reports the design and fabrication of a micro-electro-mechanical-system (MEMS)-based electrostatic angular microactuator for a dual-stage servo. We propose a new driving scheme that uses the vector sum of the force generated by parallel plate and comb-finger. To maximize the driving moment, the moving and fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. We designed a 2-mm diameter microactuator that can position the pico-slider over ± 1 μm stroke using under 18 volts with a 1 kHz flexural natural frequency for a 2 kHz fine-tracking servo.

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