Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)

Single crystal silicon (SCS) micromirror arrays using deep silicon etching and IR alignment

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) ◽

10.1109/memsys.2000.838558 ◽

2002 ◽

Cited By ~ 2

Author(s):

C.S.B. Lee ◽

R.Y. Webb ◽

J.M. Chong ◽

N.C. MacDonald

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Silicon Etching ◽

Crystal Silicon ◽

Micromirror Arrays

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A new deep reactive ion etching process by dual sidewall protection layer

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) ◽

10.1109/memsys.2000.838529 ◽

2002 ◽

Cited By ~ 5

Author(s):

J. Ohara ◽

K. Kano ◽

Y. Takeuchi ◽

N. Ohya ◽

Y. Otsuka ◽

...

Keyword(s):

Reactive Ion Etching ◽

Etching Process ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

Protection Layer

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A novel micro gas sensor with high selectivity based on both mass and conductivity measurement

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) ◽

10.1109/memsys.2000.838499 ◽

2002 ◽

Author(s):

Tao Xu ◽

Guoying Wu ◽

Guobing Zhang ◽

Wei Wang ◽

Ting Li

Keyword(s):

Gas Sensor ◽

High Selectivity ◽

Conductivity Measurement ◽

Micro Gas Sensor

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Damping of micro electrostatic torsion mirror caused by air-film viscosity

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) ◽

10.1109/memsys.2000.838559 ◽

2002 ◽

Author(s):

N. Uchida ◽

K. Uchimaru ◽

M. Yonezawa ◽

M. Sekimura

Keyword(s):

Air Film ◽

Film Viscosity

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Torque measurement method using air turbine for micro devices

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) ◽

10.1109/memsys.2000.838520 ◽

2002 ◽

Cited By ~ 1

Author(s):

H. Ota ◽

L. Li ◽

M. Takeda ◽

H. Narumiya ◽

T. Ohara ◽

...

Keyword(s):

Measurement Method ◽

Torque Measurement ◽

Air Turbine

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Microrelays for batch transfer integration in RF systems

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) ◽

10.1109/memsys.2000.838618 ◽

2002 ◽

Cited By ~ 19

Author(s):

V. Milanovic ◽

M. Maharbiz ◽

A. Singh ◽

B. Warneke ◽

Ningning Zhou ◽

...

Keyword(s):

Rf Systems

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An air flow sensor modeled on wind receptor hairs of insects

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) ◽

10.1109/memsys.2000.838573 ◽

2002 ◽

Cited By ~ 37

Author(s):

Y. Ozaki ◽

T. Ohyama ◽

T. Yasuda ◽

I. Shimoyama

Keyword(s):

Air Flow ◽

Flow Sensor

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Nano-scale bending test of Si beam for MEMS

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) ◽

10.1109/memsys.2000.838517 ◽

2002 ◽

Cited By ~ 12

Author(s):

T. Namazu ◽

Y. Isono ◽

T. Tanaka

Keyword(s):

Bending Test ◽

Nano Scale

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A new class of thermal flow sensors using ΔT=0 as a control signal

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) ◽

10.1109/memsys.2000.838572 ◽

2002 ◽

Cited By ~ 11

Author(s):

T.S.J. Lammerink ◽

N.R. Tas ◽

G.J.M. Krijnen ◽

M. Elwenspoek

Keyword(s):

Control Signal ◽

Thermal Flow ◽

Flow Sensors ◽

New Class

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Electrical isolation of bulk silicon MEMS devices via thermomigration

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) ◽

10.1109/memsys.2000.838507 ◽

2002 ◽

Author(s):

C.C. Chung ◽

M.G. Allen

Keyword(s):

Mems Devices ◽

Bulk Silicon ◽

Electrical Isolation

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Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)
Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Single crystal silicon (SCS) micromirror arrays using deep silicon etching and IR alignment

A new deep reactive ion etching process by dual sidewall protection layer

A novel micro gas sensor with high selectivity based on both mass and conductivity measurement

Damping of micro electrostatic torsion mirror caused by air-film viscosity

Torque measurement method using air turbine for micro devices

Microrelays for batch transfer integration in RF systems

An air flow sensor modeled on wind receptor hairs of insects

Nano-scale bending test of Si beam for MEMS

A new class of thermal flow sensors using ΔT=0 as a control signal

Electrical isolation of bulk silicon MEMS devices via thermomigration

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Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Single crystal silicon (SCS) micromirror arrays using deep silicon etching and IR alignment

A new deep reactive ion etching process by dual sidewall protection layer

A novel micro gas sensor with high selectivity based on both mass and conductivity measurement

Damping of micro electrostatic torsion mirror caused by air-film viscosity

Torque measurement method using air turbine for micro devices

Microrelays for batch transfer integration in RF systems

An air flow sensor modeled on wind receptor hairs of insects

Nano-scale bending test of Si beam for MEMS

A new class of thermal flow sensors using ΔT=0 as a control signal

Electrical isolation of bulk silicon MEMS devices via thermomigration

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)
Latest Publications