Lumped model for the comb-finger capacitance and electrostatic force

2004 ◽  
Author(s):  
Xuyuan Chen ◽  
Zhichun Ma ◽  
Geir U. Jensen
Keyword(s):  
Electrostatic Force ◽  
Lumped Model ◽  
Comb Finger

Tolerance Analysis of Comb-Driving Double Ended Tuning Fork Resonator Fabricated by DRIE Technology

2014 ◽  
Vol 609-610 ◽  
pp. 1375-1380
Author(s):  
Rui Li Meng ◽  
Hong Qun Zhang ◽  
Heng Liu
Keyword(s):  
Resonance Frequency ◽  
Electrostatic Force ◽  
Tolerance Analysis ◽  
Design Stage ◽  
Positive Slope ◽  
Mechanical Stiffness ◽  
Lateral Direction ◽  
Deep Reactive Ion Etching ◽  
Comb Finger ◽  
Fabrication Tolerances

Deep reactive ion etching (DRIE) process is specially invented for bulk micromachining fabrication with the objective of realizing high aspect ratio microstructures. However, various tolerances, such as slanted etched profile, uneven deep beams and undercut, cannot be avoided during the fabrication process. In this paper, the slanted etched profile fabrication tolerance with its effect on the performances of lateral comb-driving resonator, in terms of electrostatic force, mechanical stiffness, and resonance frequency, are discussed. It shows that comb finger with positive slope generates larger electrostatic force. The mechanical stiffness along lateral direction increases when the suspended beam slants negatively. The resonance frequency is 1.116 times larger if the comb finger and beam are tapered to -20and + 20, respectively. These analytical results can be used to compensate the fabrication tolerances at design stage and allow the resonator to provide more predictable performance.

Enhanced type I photoreaction of indocyanine green via electrostatic-force-driven aggregation

Nanoscale ◽  
2020 ◽  
Vol 12 (17) ◽  
pp. 9517-9523 ◽  
Author(s):  
Huizhen Fan ◽  
Yu Fan ◽  
Wenna Du ◽  
Rui Cai ◽  
Xinshuang Gao ◽  
...  
Keyword(s):  
Mesoporous Silica ◽  
Indocyanine Green ◽  
Electrostatic Force ◽  
Type I ◽  
Positively Charged

ICG forms aggregates in positively charged mesoporous silica, which show an enhanced type I photoreaction pathway.

Enhancements of Non-contact Measurements of Electrical Waveforms on the Proximity of a Signal Surface Using Groups of Pulses

2002 ◽  
Author(s):  
Fenglei Du ◽  
Greg Bridges ◽  
D.J. Thomson ◽  
Rama R. Goruganthu ◽  
Shawn McBride ◽  
...  
Keyword(s):  
Integrated Circuits ◽  
Integrated Circuit ◽  
Signal To Noise Ratio ◽  
Electrostatic Force ◽  
Single Pulse ◽  
Electric Signal ◽  
Measurement Instruments ◽  
Cycle Times ◽  
Force Microscopy ◽  
And Performance

Abstract With the ever-increasing density and performance of integrated circuits, non-invasive, accurate, and high spatial and temporal resolution electric signal measurement instruments hold the key to performing successful diagnostics and failure analysis. Sampled electrostatic force microscopy (EFM) has the potential for such applications. It provides a noninvasive approach to measuring high frequency internal integrated circuit signals. Previous EFMs operate using a repetitive single-pulse sampling approach and are inherently subject to the signal-to-noise ratio (SNR) problems when test pattern duty cycle times become large. In this paper we present an innovative technique that uses groups of pulses to improve the SNR of sampled EFM systems. The approach can easily provide more than an order-ofmagnitude improvement to the SNR. The details of the approach are presented.

scholarly journals Thermal Noise Decoupling of Micro-Newton Thrust Measured in a Torsion Balance

Symmetry ◽  
2021 ◽  
Vol 13 (8) ◽  
pp. 1357
Author(s):  
Linxiao Cong ◽  
Jianchao Mu ◽  
Qian Liu ◽  
Hao Wang ◽  
Linlin Wang ◽  
...  
Keyword(s):  
Thermal Noise ◽  
Rotation Axis ◽  
Electrostatic Force ◽  
Thermal Control ◽  
Positive Temperature Coefficient ◽  
Torsion Balance ◽  
Positive Temperature ◽  
Thermal Drift ◽  
Low Thrust ◽  
Z Domain

The space gravitational wave detection and drag free control requires the micro-thruster to have ultra-low thrust noise within 0.1 mHz–0.1 Hz, which brings a great challenge to calibration on the ground because it is impossible to shield any spurious couplings due to the asymmetry of torsion balance. Most thrusters dissipate heat during the test, making the rotation axis tilt and components undergo thermal drift, which is hysteretic and asymmetric for micro-Newton thrust measurement. With reference to LISA’s research and coming up with ideas inspired from proportional-integral-derivative (PID) control and multi-timescale (MTS), this paper proposes to expand the state space of temperature to be applied on the thrust prediction based on fine tree regression (FTR) and to subtract the thermal noise filtered by transfer function fitted with z-domain vector fitting (ZDVF). The results show that thrust variation of diurnal asymmetry in temperature is decoupled from 24 μN/Hz1/2 to 4.9 μN/Hz1/2 at 0.11 mHz. Additionally, 1 μN square wave modulation of electrostatic force is extracted from the ambiguous thermal drift background of positive temperature coefficient (PTC) heater. The PID-FTR validation is performed with experimental data in thermal noise decoupling, which can guide the design of thermal control and be extended to other physical quantities for noise decoupling.

scholarly journals Review of time-resolved non-contact electrostatic force microscopy techniques with applications to ionic transport measurements

2019 ◽  
Vol 10 ◽  
pp. 617-633 ◽  
Author(s):  
Aaron Mascaro ◽  
Yoichi Miyahara ◽  
Tyler Enright ◽  
Omur E Dagdeviren ◽  
Peter Grütter
Keyword(s):  
Atomic Force Microscopy ◽  
Electrostatic Force ◽  
Oscillation Period ◽  
Electrostatic Force Microscopy ◽  
Time Varying ◽  
Time Resolved ◽  
Battery Materials ◽  
Force Microscopy ◽  
Atomic Force ◽  
Microscopy Techniques

Recently, there have been a number of variations of electrostatic force microscopy (EFM) that allow for the measurement of time-varying forces arising from phenomena such as ion transport in battery materials or charge separation in photovoltaic systems. These forces reveal information about dynamic processes happening over nanometer length scales due to the nanometer-sized probe tips used in atomic force microscopy. Here, we review in detail several time-resolved EFM techniques based on non-contact atomic force microscopy, elaborating on their specific limitations and challenges. We also introduce a new experimental technique that can resolve time-varying signals well below the oscillation period of the cantilever and compare and contrast it with those previously established.

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