A Microactuator for a High-Density Hard Disk Drive

2000 ◽  
Author(s):  
Dong-Woo Cho ◽  
Jong-Young Kim ◽  
Sang-Jo Lee ◽  
Ji-Whang Park ◽  
Seok-Moon Choi ◽  
...  
Keyword(s):  
Mechanical System ◽  
Natural Frequency ◽  
Hard Disk Drive ◽  
Driving Force ◽  
Parallel Plate ◽  
Disk Drive ◽  
Micro Electro Mechanical System ◽  
Comb Finger ◽  
Dual Stage ◽  
Vector Sum

Abstract This paper reports the design and fabrication of a micro-electro-mechanical-system (MEMS)-based electrostatic angular microactuator for a dual-stage servo. We propose a new driving scheme that uses the vector sum of the force generated by parallel plate and comb-finger. To maximize the driving moment, the moving and fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. We designed a 2-mm diameter microactuator that can position the pico-slider over ± 1 μm stroke using under 18 volts with a 1 kHz flexural natural frequency for a 2 kHz fine-tracking servo.

Static and dynamic characterization of micro-electro-mechanical system repulsive force actuators

2019 ◽  
Vol 26 (13-14) ◽  
pp. 1216-1231 ◽  
Author(s):  
Mohammadreza Zamanzadeh ◽  
Saber Azizi
Keyword(s):  
Mechanical System ◽  
Natural Frequency ◽  
Fold Increase ◽  
Micro Electro Mechanical System ◽  
Linear Increase ◽  
Repulsive Force ◽  
Dominant Factor ◽  
Dynamic Characterization ◽  
High Tunability

This paper presents the static and dynamic response characterization of an electrostatic micro-electro-mechanical system mirror driven by repulsive force. The experimental analysis of the static response in different seasons of the year indicates that the capillary force caused by the thin layer of water underneath the mirror is the dominant factor for variation in the lifting threshold of the applied voltage. Dynamic characterization of the mirror reveals a large natural frequency of 2.6 kHz at the increasing rate of 8 Hz/V, indicating a four-fold increase compared to a previous design. This high natural frequency with an almost linear increase is desired for fast speed scanners and interferometers with high tunability benefited from the simplified signal processing circuit. Since the amplitude of the repulsive force micro-structure is no longer restricted to any geometrical limitation, the non-dimensionalizing parameters are chosen so that the nonlinear terms are small enough in order that the perturbation method is applicable in the vicinity of both primary and principal parametric resonances. The analytical analysis shows the way for inserting a bookkeeping parameter in a simple manner based on the evaluation of the magnitude of order in which the pre-assumed value is further validated by experimental results. The results of our investigations can be used to analytically evaluate the static and dynamic behavior of the system and have important applications in the design of various devices such as filters, interferometers, and switches.

Comparison of Robust Track-Following Control Systems for a Dual Stage Hard Disk Drive

1999 ◽  
pp. 101-118 ◽  
Author(s):  
Toshiya Suzuki ◽  
Takamasa Usui ◽  
Minoru Sasaki ◽  
Fumio Fujisawa ◽  
Takashi Yoshida ◽  
...  
Keyword(s):  
Control Systems ◽  
Hard Disk Drive ◽  
Hard Disk ◽  
Disk Drive ◽  
Dual Stage

Application of Piezoelectric Materials for Use as Actuators and Sensors in Hard Disk Drive Suspension Assemblies

1999 ◽  
Vol 604 ◽  
Author(s):  
J. R. Heffelfinger ◽  
D. A. Boismier
Keyword(s):  
Hard Disk Drive ◽  
Piezoelectric Materials ◽  
Hard Disk ◽  
Disk Drive ◽  
Critical Material ◽  
Piezoelectric Motors ◽  
Dual Stage ◽  
Voltage Generation ◽  
Aging Rates ◽  
Fft Analysis

AbstractSuspension assemblies, the mechanical arm that supports the read/write head in a Hard Disk Drive (HDD), are incorporating piezoelectric motors for dual-stage actuation. With high displacements and high Curie Temperatures, lead zirconium titanate (PZT) is the preferred piezoelectric material for this application. In this study, commercially available PZT is studied for critical material properties that include strength, aging and particulate generation. An average PZT strength of 111.7 MPa and a Weibull parameter (m) of 12.18 was measured for the material. Aging rates of the dielectric constant vary between 1.9 to 3.2 % per time decade depending on the test condition. The attachment of PZT motors to the suspension assembly provides a method of sensing suspension resonance, shock and temperature fluctuations. Fast Fourier Transform (FFT) analysis of voltage generation of the PZT during drive operation identified a frequency of 6509 Hz that is within 0.2% of the measured resonance frequency of the suspension. The PZT generated several volts for shock events between 500 to 2000 G's of the suspension. Implications of the material parameters and potential sensing capabilities of the PZT are discussed.

Dynamics of a Nonlinear Mechanical Resonator in Micro-Electro-Mechanical Systems

2001 ◽  
Author(s):  
Albert C. J. Luo ◽  
F. Y. Wang
Keyword(s):  
Mechanical System ◽  
Natural Frequency ◽  
Chaotic Motion ◽  
Alternating Current ◽  
Micro Electro Mechanical System ◽  
Voltage Amplitude ◽  
Mechanical Resonator ◽  
Chaotic Motions ◽  
Micro Electro Mechanical Systems ◽  
Nonlinear Mechanical

Abstract Equilibrium, natural frequency and responses of a mechanical resonator with capacitors in a simplified micro-electro-mechanical system (MEMS) are determined. Under application of alternating current (AC) voltage, the resonant conditions for such a system are obtained. The chaotic motions in the vicinity of a specified resonant-separatrix are investigated analytically and numerically. For a given AC voltage amplitude, the AC frequency bands are obtained for chaotic motion in the specific resonant layers and resonant motions, and such chaotic motions can be sensed very easily by the output transducer in MEMS.

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