High Rate And Selective Reactive Ion Etching Of Polysilicon

1990 ◽  
Author(s):  
L. Y. Tsou
Keyword(s):  
Reactive Ion Etching ◽  
High Rate ◽  
Ion Etching

High rate reactive ion etching of Al2O3 and Si

1980 ◽  
Vol 17 (3) ◽  
pp. 731-734 ◽  
Author(s):  
Neil Heiman ◽  
Vincent Minkiewicz ◽  
Brian Chapman
Keyword(s):  
Reactive Ion Etching ◽  
High Rate ◽  
Ion Etching

High-Rate Reactive Ion Etching of SiO2Using a Magnetron Discharge

1981 ◽  
Vol 20 (11) ◽  
pp. L817-L820 ◽  
Author(s):  
Yasuhiro Horiike ◽  
Haruo Okano ◽  
Takashi Yamazaki ◽  
Hiromichi Horie
Keyword(s):  
Reactive Ion Etching ◽  
High Rate ◽  
Magnetron Discharge ◽  
Ion Etching

Smooth and high-rate reactive ion etching of diamond

2002 ◽  
Vol 11 (3-6) ◽  
pp. 824-827 ◽  
Author(s):  
Yutaka Ando ◽  
Yoshiki Nishibayashi ◽  
Koji Kobashi ◽  
Takashi Hirao ◽  
Kenjiro Oura
Keyword(s):  
Reactive Ion Etching ◽  
High Rate ◽  
Ion Etching
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