Capability Of Kinetic Ellipsometry As An In Situ Control System For Ultra Thin Layers Stacks Growth: Application To The Realization Of Performant Soft X Ray Optics

1987 ◽  
Author(s):  
P. Houdy ◽  
V. Bodart ◽  
L. Nevot ◽  
D. Corno ◽  
B. Pardo ◽  
...  
1998 ◽  
Author(s):  
Brian K. Tanner ◽  
Andrew M. Keir ◽  
Peter Moeck ◽  
Colin R. Whitehouse ◽  
Gareth Lacey ◽  
...  
Keyword(s):  
X Ray ◽  

Author(s):  
Shang-Wei Lin ◽  
Duan-Jen Wang ◽  
Chih-Yu Hua ◽  
Hok-Sum Fung ◽  
Ming-Ying Hsu ◽  
...  
Keyword(s):  
X Ray ◽  

2009 ◽  
Vol 48 (7) ◽  
pp. 072503 ◽  
Author(s):  
Takashi Kimura ◽  
Soichiro Handa ◽  
Hidekazu Mimura ◽  
Hirokatsu Yumoto ◽  
Daisuke Yamakawa ◽  
...  

2002 ◽  
Vol 17 (2) ◽  
pp. 99-103 ◽  
Author(s):  
Zewu Chen ◽  
Walter M. Gibson

Doubly curved crystal (DCC) X-ray optics provide an enabling technology for new portable, remote, and in situ applications of monochromatic X-rays for composition and structure analysis of amorphous, polycrystalline, and crystalline solids. Femtogram sensitivity for surface contamination, parts-per-billion (ppb) impurity levels for solids, and composition, structure and uniformity of thin films with compact, low power (20–50 W) source optic combinations are possible.


2016 ◽  
Author(s):  
George Atanasoff ◽  
Christopher J. Metting ◽  
Hasso von Bredow

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