Quantitative Depth Profiling Analysis Of (Al,Ga)As Structures By Secondary Neutral Mass Spectrometry (SNMS)

1988 ◽  
Author(s):  
Nicola Kelly ◽  
Ulrich Kaiser
2015 ◽  
Vol 30 (5) ◽  
pp. 1108-1116 ◽  
Author(s):  
Marcos Bouza ◽  
Rosario Pereiro ◽  
Nerea Bordel ◽  
Alfredo Sanz-Medel ◽  
Beatriz Fernández

The potential of rf-PGD-ToFMS for quantitative depth profiling analysis of thin layers on glasses has been investigated.


2014 ◽  
Vol 46 (S1) ◽  
pp. 341-343
Author(s):  
Tae Woon Kim ◽  
Hyun Jeong Baek ◽  
Jong Shik Jang ◽  
Seung Mi Lee ◽  
Kyung Joong Kim

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