Rapid, semi-quantitative depth profiling of ultra-thin films using plasma profiling time-of-flight mass spectrometry: AM: Advanced metrology

2017 ◽  
Author(s):  
Yann Mazel ◽  
Jean-Paul Barnes ◽  
Emmanuel Nolot ◽  
Agnes Tempez ◽  
Sebastien Legendre
Keyword(s):  
Mass Spectrometry ◽  
Thin Films ◽  
Time Of Flight ◽  
Depth Profiling ◽  
Flight Mass Spectrometry

Depth profiling by pulsed glow discharge time-of-flight mass spectrometry with a combined hollow cathode cell

2020 ◽  
Vol 35 (8) ◽  
pp. 1587-1596
Author(s):  
Anna Gubal ◽  
Victoria Chuchina ◽  
Yegor Lyalkin ◽  
Vladimir Mikhailovskii ◽  
Viktor Yakobson ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Glow Discharge ◽  
Hollow Cathode ◽  
Time Of Flight ◽  
Depth Profiling ◽  
Discharge Time ◽  
Pulsed Glow Discharge ◽  
Flight Mass Spectrometry ◽  
Depth Analysis ◽  
Mass Spectrometry System

A combined hollow cathode microsecond direct current pulsed glow discharge time-of-flight mass spectrometry system has proved its efficiency for quantification; however, it has not been properly tested for the purpose of depth analysis.

scholarly journals Excitation and quenching mechanisms in the near-UV photodissociation of CH3Br and CH3Cl adsorbed on D2O or CH3OH on Cu(110)

2015 ◽  
Vol 17 (14) ◽  
pp. 9173-9185 ◽  
Author(s):  
E. T. Jensen
Keyword(s):  
Mass Spectrometry ◽  
Thin Films ◽  
Time Of Flight ◽  
Photochemical Processes ◽  
Flight Mass Spectrometry ◽  
Quenching Mechanisms ◽  
193 Nm

Photochemical processes for CH3X (X = Cl, Br, I) adsorbed on top of thin films of D2O or CH3OH on a Cu(110) substrate is studied by time-of-flight mass spectrometry for a range of UV wavelengths (351–193 nm).

scholarly journals Amorphous Ge-Bi-Se Thin Films: A Mass Spectrometric Study

2019 ◽  
Vol 9 (1) ◽  
Author(s):  
Ravi Mawale ◽  
Govinda Mandal ◽  
Marek Bouška ◽  
Jan Gutwirth ◽  
Pankaj Lochan Bora ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Thin Films ◽  
Laser Ablation ◽  
Density Functional ◽  
Structural Information ◽  
Time Of Flight ◽  
Mass Spectrometry Analysis ◽  
Individual Species ◽  
Ablation Time ◽  
Flight Mass Spectrometry

AbstractThe Ge-Bi-Se thin films of varied compositions (Ge content 0–32.1 at. %, Bi content 0–45.7 at. %, Se content 54.3–67.9 at. %) have been prepared by rf magnetron (co)-sputtering technique. The present study was undertaken in order to investigate the clusters generated during the interaction of laser pulses with Ge-Bi-Se thin films using laser ablation time-of-flight mass spectrometry. The stoichiometry of the clusters was determined in order to understand the individual species present in the plasma plume. Laser ablation of Ge-Bi-Se thin films accompanied by ionization produces about 20 positively and/or negatively charged unary, binary and ternary (Gex+, Biy+, Sez+/−, GexSez+/−, BiySez+/− and GexBiySez−) clusters. Furthermore, we performed the laser ablation experiments of Ge:Bi:Se elemental mixtures and the results were compared with laser ablation time-of-flight mass spectrometry analysis of thin films. Moreover, to understand the geometry of the generated clusters, we calculated structures of some selected binary and ternary clusters using density functional theory. The generated clusters and their calculated possible geometries can give important structural information, as well as help to understand the processes present in the plasma processes exploited for thin films deposition.

Depth profiling of nanometer thin layers by laser desorption and laser postionization time-of-flight mass spectrometry

2017 ◽  
Vol 32 (10) ◽  
pp. 1878-1884 ◽  
Author(s):  
Zhibin Yin ◽  
Xiaoling Cheng ◽  
Rong Liu ◽  
Wei Hang ◽  
Benli Huang
Keyword(s):  
Mass Spectrometry ◽  
Mass Spectrometer ◽  
Time Of Flight ◽  
Depth Profiling ◽  
Laser Desorption ◽  
Thin Layers ◽  
Flight Mass Spectrometer ◽  
Flight Mass Spectrometry

A laser desorption and laser postionization time-of-flight mass spectrometer was employed for the depth profiling of nanometer thin-layers.

Time-of-flight mass spectrometry depth profiling of sodium-implanted polyethylene terephthalate

2017 ◽  
Vol 49 (10) ◽  
pp. 1049-1052
Author(s):  
Yu Kudriavtsev ◽  
A.G. Hernández ◽  
R. Asomoza ◽  
V.M. Korol
Keyword(s):  
Mass Spectrometry ◽  
Polyethylene Terephthalate ◽  
Time Of Flight ◽  
Depth Profiling ◽  
Flight Mass Spectrometry
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