A virtual pivot point MEMS rotary comb actuator for tunable laser applications
2021 ◽
pp. 1-1
Keyword(s):
1987 ◽
Vol 39
(1)
◽
pp. 29-33
◽
1987 ◽
Vol 48
(C7)
◽
pp. C7-451-C7-454
1997 ◽
Vol 8
(1-2)
◽
pp. 121-128
◽
Keyword(s):