Resist outgassing characterization for qualification in high power EUV lithography

2012 ◽  
Author(s):  
Toshiya Takahashi ◽  
Norihiko Sugie ◽  
Kazuhiro Katayama ◽  
Isamu Takagi ◽  
Yukiko Kikuchi ◽  
...  
Keyword(s):  
High Power ◽  
Euv Lithography

High-Power, High-Repetition-Rate Pulsed CO2 Lasers and their application in EUV lithography sources

2016 ◽  
Author(s):  
Yezheng Tao ◽  
Alex Schafgans ◽  
Slava Rokitski ◽  
Michael Kats ◽  
Jayson Stewart ◽  
...  
Keyword(s):  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
Co2 Lasers ◽  
High Repetition ◽  
Euv Lithography

High-power EUV lithography sources based on gas discharges and laser-produced plasmas

2003 ◽  
Author(s):  
Uwe Stamm ◽  
Imtiaz Ahmad ◽  
Istvan Balogh ◽  
H. Birner ◽  
D. Bolshukhin ◽  
...  
Keyword(s):  
High Power ◽  
Gas Discharges ◽  
Euv Lithography

scholarly journals High-power EUV lithography: spectral purity and imaging performance

2020 ◽  
Vol 19 (03) ◽  
Author(s):  
Mark van de Kerkhof ◽  
Fei Liu ◽  
Marieke Meeuwissen ◽  
Xueqing Zhang ◽  
Muharrem Bayraktar ◽  
...  
Keyword(s):  
High Power ◽  
Spectral Purity ◽  
Euv Lithography ◽  
Imaging Performance

High-power plasma discharge source at 13.5 nm and 11.4 nm for EUV lithography

1999 ◽  
Author(s):  
William T. Silfvast ◽  
M. Klosner ◽  
Gregory M. Shimkaveg ◽  
Howard Bender ◽  
Glenn D. Kubiak ◽  
...  
Keyword(s):  
High Power ◽  
Plasma Discharge ◽  
Discharge Source ◽  
Euv Lithography

High-power pulsed CO 2 laser for EUV lithography

2006 ◽  
Author(s):  
Tatsuya Ariga ◽  
Hideo Hoshino ◽  
Taisuke Miura ◽  
Akira Endo
Keyword(s):  
High Power ◽  
Euv Lithography

Development of short pulse and high power CO 2 laser for EUV lithography

2005 ◽  
Author(s):  
Akira Endo ◽  
Hideo Hoshino ◽  
Tatsuya Ariga ◽  
Taisuke Miura
Keyword(s):  
High Power ◽  
Short Pulse ◽  
Euv Lithography

High-power sources for EUV lithography: state of the art

2004 ◽  
Author(s):  
Uwe Stamm ◽  
Juergen Kleinschmidt ◽  
Kai M. Gaebel ◽  
Henry Birner ◽  
Imtiaz Ahmad ◽  
...  
Keyword(s):  
High Power ◽  
State Of The Art ◽  
Power Sources ◽  
Euv Lithography

scholarly journals High power fiber laser driver for efficient EUV lithography source with tin-doped water droplet targets

2008 ◽  
Vol 16 (2) ◽  
pp. 965 ◽  
Author(s):  
Kai-Chung Hou ◽  
Simi George ◽  
Aghapi G. Mordovanakis ◽  
Kazutoshi Takenoshita ◽  
John Nees ◽  
...  
Keyword(s):  
Fiber Laser ◽  
High Power ◽  
Water Droplet ◽  
Euv Lithography ◽  
Laser Driver

Dynamic Modeling and Wear-Based Remaining Useful Life Prediction of High Power Clutch Systems

2005 ◽  
Vol 48 (2) ◽  
pp. 208-217 ◽  
Author(s):  
Matthew Watson ◽  
Carl Byington ◽  
Douglas Edwards ◽  
Sanket Amin
Keyword(s):  
Dynamic Modeling ◽  
High Power ◽  
Life Prediction ◽  
Remaining Useful Life ◽  
Useful Life
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