High-power sources for EUV lithography: state of the art

Author(s):  
Uwe Stamm ◽  
Juergen Kleinschmidt ◽  
Kai M. Gaebel ◽  
Henry Birner ◽  
Imtiaz Ahmad ◽  
...  
2011 ◽  
Vol 54 (1) ◽  
pp. 70-76 ◽  
Author(s):  
A. M. Efremov ◽  
V. I. Koshelev ◽  
B. M. Kovalchuk ◽  
V. V. Plisko ◽  
K. N. Sukhushin

Author(s):  
Deri Sheppard

In March 1908, the BASF at Ludwigshafen provided financial support to Fritz Haber in his attempt to synthesize ammonia from the elements. The process that now famously bears his name was demonstrated to BASF in July 1909. However, its engineer was Haber's private assistant, Robert Le Rossignol, a young British chemist from the Channel Islands with whom Haber made a generous financial arrangement regarding subsequent royalties. Le Rossignol left Haber in August 1909 as BASF began the industrialization of their process, taking a consultancy at the Osram works in Berlin. He was interned briefly during World War I before being released to resume his occupation. His position eventually led to His Majesty's Government formulating a national policy regarding released British internees in Germany. After the war Le Rossignol spent his professional life at the GEC laboratories in the UK, first making fundamental contributions to the development of high-power radio transmitting valves, then later developing smaller valves used as mobile power sources in the airborne radars of World War II. Through his share of Haber's royalties, Le Rossignol became wealthy. In retirement, he and his wife gave their money away to charitable causes.


2019 ◽  
Vol 41 (8) ◽  
pp. 19-30 ◽  
Author(s):  
Matthew J. Marinella ◽  
Stanley Atcitty ◽  
Sandeepan DasGupta ◽  
Robert J. Kaplar ◽  
Mark A. Smith

2017 ◽  
Vol 32 (10) ◽  
pp. 1833-1847 ◽  
Author(s):  
Sascha Nowak ◽  
Martin Winter

Being successfully introduced into the market only 25 years ago, lithium ion batteries are already state-of-the-art power sources for portable electronic devices and the most promising candidate for energy storage in large-size batteries. Therefore, elemental analysis of lithium ion batteries (lithium ion batteries), their components and decomposition products is a fast growing topic in the literature.


2020 ◽  
Vol 30 (29) ◽  
pp. 2070191 ◽  
Author(s):  
Taiki Takamatsu ◽  
Yin Sijie ◽  
Fang Shujie ◽  
Liu Xiaohan ◽  
Takeo Miyake

2015 ◽  
Vol 30 (22) ◽  
pp. 1530051 ◽  
Author(s):  
Alex Chao

A recently proposed technique in storage ring accelerators is applied to provide potential high-power sources of photon radiation. The technique is based on the steady-state microbunching (SSMB) mechanism. As examples of this application, one may consider a high-power DUV photon source for research in atomic and molecular physics or a high-power EUV radiation source for industrial lithography. A less challenging proof-of-principle test to produce IR radiation using an existing storage ring is also considered.


2000 ◽  
Vol 67 (11) ◽  
pp. 984 ◽  
Author(s):  
V. A. Orlovich ◽  
P. A. Apanasevich ◽  
S. A. Batishche ◽  
V. N. Belyi ◽  
A. A. Bui ◽  
...  

2009 ◽  
Vol 1 (4) ◽  
pp. 339-345 ◽  
Author(s):  
Vincenzo Alleva ◽  
Andrea Bettidi ◽  
Walter Ciccognani ◽  
Marco De Dominicis ◽  
Mauro Ferrari ◽  
...  

This work presents the design, fabrication, and test of X-band and 2–18 GHz wideband high-power single pole double throw (SPDT) monolithic microwave integrated circuit (MMIC) switches in microstrip gallium nitride (GaN) technology. Such switches have demonstrated state-of-the-art performances and RF fabrication yields better than 65%. In particular, the X-band switch exhibits 1 dB insertion loss, better than 37 dB isolation, and a power handling capability better than 39 dBm at a 1 dB insertion loss compression point; the wideband switch shows an insertion loss lower than 2.2 dB, better than 25 dB isolation, and an insertion loss compression of 1 dB at an input drive higher than 38.5 dBm in the entire bandwidth.


2019 ◽  
Vol 113 ◽  
pp. 03006
Author(s):  
Stefano Bracco ◽  
Federico Delfino ◽  
Paola Laiolo ◽  
Luisa Pagnini ◽  
Giorgio Piazza

A microgrid can be considered a profitable solution to be adopted in smart cities if it is marketable, i.e. more, or at least equally convenient than other traditional energy supply sources. Different economic parameters can be defined to determine its affordability. In particular, the LCOE (Levelized Cost of Electricity) is the most popular indicator adopted in the energy sector, widely used both for conventional and renewable power sources. However, the use of this metric still disregards important aspects that concerns microgrid applications. After providing a state-of-the-art of the use of LCOE, the present paper proposes a new methodology for sustainable microgrids in smart city, taking into account benefits due to cogeneration and trigeneration, integration costs as well as positive and negative side effects.


Sign in / Sign up

Export Citation Format

Share Document