High-power EUV lithography sources based on gas discharges and laser-produced plasmas

2003 ◽  
Author(s):  
Uwe Stamm ◽  
Imtiaz Ahmad ◽  
Istvan Balogh ◽  
H. Birner ◽  
D. Bolshukhin ◽  
...  
Keyword(s):  
High Power ◽  
Gas Discharges ◽  
Euv Lithography

High-Power, High-Repetition-Rate Pulsed CO2 Lasers and their application in EUV lithography sources

2016 ◽  
Author(s):  
Yezheng Tao ◽  
Alex Schafgans ◽  
Slava Rokitski ◽  
Michael Kats ◽  
Jayson Stewart ◽  
...  
Keyword(s):  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
Co2 Lasers ◽  
High Repetition ◽  
Euv Lithography

Resist outgassing characterization for qualification in high power EUV lithography

2012 ◽  
Author(s):  
Toshiya Takahashi ◽  
Norihiko Sugie ◽  
Kazuhiro Katayama ◽  
Isamu Takagi ◽  
Yukiko Kikuchi ◽  
...  
Keyword(s):  
High Power ◽  
Euv Lithography

scholarly journals High-power EUV lithography: spectral purity and imaging performance

2020 ◽  
Vol 19 (03) ◽  
Author(s):  
Mark van de Kerkhof ◽  
Fei Liu ◽  
Marieke Meeuwissen ◽  
Xueqing Zhang ◽  
Muharrem Bayraktar ◽  
...  
Keyword(s):  
High Power ◽  
Spectral Purity ◽  
Euv Lithography ◽  
Imaging Performance

High-power plasma discharge source at 13.5 nm and 11.4 nm for EUV lithography

1999 ◽  
Author(s):  
William T. Silfvast ◽  
M. Klosner ◽  
Gregory M. Shimkaveg ◽  
Howard Bender ◽  
Glenn D. Kubiak ◽  
...  
Keyword(s):  
High Power ◽  
Plasma Discharge ◽  
Discharge Source ◽  
Euv Lithography

Scalability of rf gas discharges for high-power CO2 lasers

1994 ◽  
Author(s):  
W. Pfeiffer ◽  
K. Breining ◽  
R. Paul ◽  
Nianle Wu ◽  
Adolf Giesen ◽  
...  
Keyword(s):  
High Power ◽  
Gas Discharges

High-power pulsed CO 2 laser for EUV lithography

2006 ◽  
Author(s):  
Tatsuya Ariga ◽  
Hideo Hoshino ◽  
Taisuke Miura ◽  
Akira Endo
Keyword(s):  
High Power ◽  
Euv Lithography

Development of short pulse and high power CO 2 laser for EUV lithography

2005 ◽  
Author(s):  
Akira Endo ◽  
Hideo Hoshino ◽  
Tatsuya Ariga ◽  
Taisuke Miura
Keyword(s):  
High Power ◽  
Short Pulse ◽  
Euv Lithography

High-power sources for EUV lithography: state of the art

2004 ◽  
Author(s):  
Uwe Stamm ◽  
Juergen Kleinschmidt ◽  
Kai M. Gaebel ◽  
Henry Birner ◽  
Imtiaz Ahmad ◽  
...  
Keyword(s):  
High Power ◽  
State Of The Art ◽  
Power Sources ◽  
Euv Lithography
Sign in / Sign up

Export Citation Format

Share Document