Generation and characterization of spatially distributed laser produced plasma extreme ultraviolet source

2009 ◽  
Author(s):  
Kuang-Po Chang ◽  
Oran Morris ◽  
Fergal O'Reilly ◽  
Padraig Dunne ◽  
Gerard O'Sullivan
Keyword(s):  
Extreme Ultraviolet ◽  
Laser Produced Plasma ◽  
Spatially Distributed

Spatial and spectral characterization of a laser produced plasma source for extreme ultraviolet metrology

2004 ◽  
Vol 75 (11) ◽  
pp. 4981-4988 ◽  
Author(s):  
H. Legall ◽  
H. Stiel ◽  
U. Vogt ◽  
H. Schönnagel ◽  
P.-V. Nickles ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Plasma Source ◽  
Spectral Characterization ◽  
Laser Produced Plasma

At-wavelength, system-level flare characterization of extreme-ultraviolet optical systems

2000 ◽  
Vol 39 (17) ◽  
pp. 2941 ◽  
Author(s):  
Patrick Naulleau ◽  
Kenneth A. Goldberg ◽  
Eric M. Gullikson ◽  
Jeffrey Bokor
Keyword(s):  
Extreme Ultraviolet ◽  
System Level ◽  
Optical Systems

scholarly journals Direct spectrotemporal characterization of femtosecond extreme-ultraviolet pulses

2013 ◽  
Vol 88 (3) ◽  
Author(s):  
David Gauthier ◽  
Benoît Mahieu ◽  
Giovanni De Ninno
Keyword(s):  
Extreme Ultraviolet

Laser-produced plasma light source for extreme ultraviolet lithography

2013 ◽  
Vol 6 (1) ◽  
pp. 20-33
Author(s):  
窦银萍 DOU Yin-ping ◽  
孙长凯 SUN Chang-kai ◽  
林景全 LIN Jing-quan
Keyword(s):  
Light Source ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma

Research progress on laser-produced plasma light source for 13.5 nm extreme ultraviolet lithography

2020 ◽  
Vol 13 (1) ◽  
pp. 28-42
Author(s):  
宗 楠 ZONG Nan ◽  
胡蔚敏 HU Wei-min ◽  
王志敏 WANG Zhi-min ◽  
王小军 WANG Xiao-jun ◽  
张申金 ZHANG Shen-jin ◽  
...  
Keyword(s):  
Light Source ◽  
Extreme Ultraviolet ◽  
Research Progress ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma
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