An efficient method for transfer cross coefficient approximation in model based optical proximity correction
2013 ◽
Vol 135
(3)
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2009 ◽
Vol 48
(6)
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pp. 06FA05
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Keyword(s):
2019 ◽
Vol 9
(2S)
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pp. 448-454
Keyword(s):
2009 ◽
Vol 27
(6)
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pp. 2972
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2016 ◽
Vol 35
(10)
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pp. 1630-1639
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