Improving model-based optical proximity correction accuracy using improved process data generation
2020 ◽
Vol 24
(1)
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pp. 68
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2019 ◽
Vol 58
(38)
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pp. 17871-17884
2004 ◽
Vol 20
(8)
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pp. 777-786
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2009 ◽
Vol 48
(6)
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pp. 06FA05
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Keyword(s):