Characterizing OPC model accuracy versus lens induced polarization effects in hyper NA immersion lithography

2008 ◽  
Author(s):  
Tamer M. Tawfik ◽  
Edita Tejnil
Keyword(s):  
Induced Polarization ◽  
Model Accuracy ◽  
Polarization Effects ◽  
Immersion Lithography

Study of mask-induced polarization effects on att. PSM in immersion lithography

2006 ◽  
Author(s):  
Takashi Mizoguchi ◽  
Yousuke Kojima ◽  
Mikio Takagi ◽  
Tadashi Saga ◽  
Takashi Haraguchi ◽  
...  
Keyword(s):  
Induced Polarization ◽  
Polarization Effects ◽  
Immersion Lithography

Diffraction-Induced Polarization Effects in Optical Pattern Formation

1999 ◽  
Vol 82 (10) ◽  
pp. 2087-2090 ◽  
Author(s):  
F. Papoff ◽  
G. D'Alessandro ◽  
W. J. Firth ◽  
G.-L. Oppo
Keyword(s):  
Pattern Formation ◽  
Induced Polarization ◽  
Polarization Effects ◽  
Optical Pattern

scholarly journals Mask induced polarization effects at high NA

2005 ◽  
Author(s):  
Andrew Estroff ◽  
Yongfa Fan ◽  
Anatoly Bourov ◽  
Bruce Smith ◽  
Philippe Foubert ◽  
...  
Keyword(s):  
Induced Polarization ◽  
Polarization Effects

On: “Negative Induced‐Polarization Effects from Layered Media” by Misac N. Nabighian and Charles L. Elliot (GEOPHYSICS, December 1976, p. 1236–1255).

Geophysics ◽  
1977 ◽  
Vol 42 (5) ◽  
pp. 1064-1065 ◽  
Author(s):  
S. H. Ward ◽  
W. H. Pelton
Keyword(s):  
Layered Media ◽  
Induced Polarization ◽  
Polarization Effects

Nabighian and Elliot (1976) have stated that “it is imperative to know the complete resistivity section in order either to plan an effective induced polarization survey program or to be able to interpret quantitatively the resulting IP data.”

Electric Field Induced Polarization Effects Measured by in Situ Neutron Spectroscopy

2017 ◽  
Vol 121 (42) ◽  
pp. 23582-23591 ◽  
Author(s):  
Rosanna Ignazzi ◽  
Will P. Gates ◽  
Souleymane O. Diallo ◽  
Dehong Yu ◽  
Fanni Juranyi ◽  
...  
Keyword(s):  
Electric Field ◽  
Induced Polarization ◽  
Neutron Spectroscopy ◽  
Polarization Effects
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