High-index immersion lithography with second-generation immersion fluids to enable numerical aperatures of 1.55 for cost effective 32-nm half pitches

2007 ◽  
Author(s):  
R. H. French ◽  
V. Liberman ◽  
H. V. Tran ◽  
J. Feldman ◽  
D. J. Adelman ◽  
...  
Keyword(s):  
Second Generation ◽  
Cost Effective ◽  
High Index ◽  
Immersion Lithography

Feasibility of 37-nm half-pitch with ArF high-index immersion lithography

2007 ◽  
Author(s):  
Yoshiyuki Sekine ◽  
Miyoko Kawashima ◽  
Eiji Sakamoto ◽  
Keita Sakai ◽  
Akihiro Yamada ◽  
...  
Keyword(s):  
High Index ◽  
Immersion Lithography

scholarly journals Novel high-index resists for 193-nm immersion lithography and beyond

2007 ◽  
Author(s):  
Idriss Blakey ◽  
Lan Chen ◽  
Bronwin Dargaville ◽  
Heping Liu ◽  
Andrew Whittaker ◽  
...  
Keyword(s):  
High Index ◽  
Immersion Lithography ◽  
193 Nm

Screening of second-generation high-index liquids

2007 ◽  
Author(s):  
Eric Hendrickx ◽  
Sergei Postnikov ◽  
Philippe Foubert ◽  
Roel Gronheid ◽  
ByeongSoo Kim
Keyword(s):  
Second Generation ◽  
High Index

Third generation of advanced high-strength steels: Processing routes and properties

2016 ◽  
Vol 233 (2) ◽  
pp. 209-238 ◽  
Author(s):  
Tarun Nanda ◽  
Vishal Singh ◽  
Virender Singh ◽  
Arnab Chakraborty ◽  
Sandeep Sharma
Keyword(s):  
Automobile Industry ◽  
Second Generation ◽  
Low Cost ◽  
High Strength Steels ◽  
High Strength ◽  
Cost Effective ◽  
Processing Route ◽  
Third Generation ◽  
Specific Strength ◽  
Advanced High Strength Steels

The automobile industry is presently focusing on processing of advanced steels with superior strength–ductility combination and lesser weight as compared to conventional high-strength steels. Advanced high-strength steels are a new class of materials to meet the need of high specific strength while maintaining the high formability required for processing, and that too at reasonably low cost. First and second generation of advanced high-strength steels suffered from some limitations. First generation had high strength but low formability while second generation possessed both strength and ductility but was not cost effective. Amongst the different types of advanced high-strength steels grades, dual-phase steels, transformation-induced plasticity steels, and complex phase steels are considered as very good options for being extended into third generation advanced high-strength steels. The present review presents the various processing routes for these grades developed and discussed by different authors. A novel processing route known as quenching and partitioning route is also discussed. The review also discusses the resulting microstructures and mechanical properties achieved under various processing conditions. Finally, the key findings with regards to further research required for the processing of advanced high-strength steels of third generation have been discussed.

Current status of high-index immersion lithography development

2007 ◽  
Author(s):  
Yasuhiro Ohmura ◽  
Toshiharu Nakashima ◽  
Hiroyuki Nagasaka ◽  
Ayako Sukegawa ◽  
Satoshi Ishiyama ◽  
...  
Keyword(s):  
High Index ◽  
Current Status ◽  
Immersion Lithography

scholarly journals Second Generation Biobutanol: An Update

REAKTOR ◽  
2019 ◽  
Vol 19 (3) ◽  
pp. 101-110
Author(s):  
Dian Burhani ◽  
Eka Triwahyuni ◽  
Ruby Setiawan
Keyword(s):  
First Generation ◽  
Second Generation ◽  
Cost Effective ◽  
Production Method ◽  
Raw Material ◽  
Food Crops ◽  
Butanol Production ◽  
Clostridium Species ◽  
Food Scarcity ◽  
Absolute Requirement

Butanol, a rising star in biofuel, can be produced by two approaches, petrochemically and biologically. Currently, the most promising route for butanol production is by fermentation using Clostridium species through an anaerobic condition. However, similar to other biofuels, feedstock has greatly influenced the production of biobutanol and the search for inexpensive and abundant raw material is an absolute requirement for a cost-effective process. Second-generation biobutanol which is produced from lignocellulosic biomass of agricultural and forestry waste not only meets the requirement but also alleviates competition with food crops and thereby solves the problems of food scarcity from the first generation biobutanol. This paper delivered the latest and update information regarding biobutanol production specifically second-generation biobutanol in terms of production method, recovery, purification, status, and technoeconomic.  Keyword: biobutanol, lignocellulose, purification, recovery, technoeconomic

New high-index fluids for immersion lithography

2006 ◽  
Author(s):  
Elizabeth Costner ◽  
J. Christopher Taylor ◽  
Stefan Caporale ◽  
William Wojtczak ◽  
Dean Dewulf ◽  
...  
Keyword(s):  
High Index ◽  
Immersion Lithography

Review of V/STOL Aircraft with Tilt-Propellers and Tilt-Rotors

1968 ◽  
Vol 72 (693) ◽  
pp. 817-830
Author(s):  
Henry V. Borst
Keyword(s):  
Second Generation ◽  
Cost Effective ◽  
Structural Failure ◽  
Secondary Importance ◽  
Flight Tests ◽  
Tilt Rotor ◽  
The Future ◽  
High Degree ◽  
Aircraft Configurations ◽  
Vtol Aircraft

Summary Tests of the first experimental VTOL aircraft using tiltable wings and propellers indicated that practical operational aircraft are possible and can operate with a high degree of effectiveness. The flight tests accomplished up to the present time with the second generation tilt-propeller and tilt-rotor aircraft are discussed and analysed. The XC-142 and the CL-84 tilt-wing aircraft have been performing well throughout their projected flight envelope and good pilot ratings have been obtained with each in hover, transition, and the normal cruise mode. The X-19 tandem wing tilt propeller was flown only up to 100 knots and was lost due to a structural failure in one nacelle. Although the operation of the aircraft had been satisfactory up to this point, this programme was terminated due to shortage of funds. A study of the various VTOL aircraft configurations operating at low radius of action indicates that the tilt wing/ tilt propeller type are the most cost-effective as long as speed is an important parameter in the operating mission. There are missions where speed is of secondary importance, and therefore, the helicopter will continue to be one of the most effective VTOL for these missions. Since the tilt-wing /tilt-rotor aircraft tend to be only slightly higher in cost than the helicopter and with development the complexity and maintainability will be reduced to acceptable levels, it is anticipated that further work will be done in the development of these vehicles, and successful and useful machines will be built in the future.

High-index resist for 193-nm immersion lithography

2008 ◽  
Author(s):  
Kazuya Matsumoto ◽  
Elizabeth Costner ◽  
Isao Nishimura ◽  
Mitsuru Ueda ◽  
C. Grant Willson
Keyword(s):  
High Index ◽  
Immersion Lithography ◽  
193 Nm
Sign in / Sign up

Export Citation Format

Share Document