Feasibility of 37-nm half-pitch with ArF high-index immersion lithography

2007 ◽  
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Keita Sakai ◽  
Akihiro Yamada ◽  
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Immersion Lithography

scholarly journals Novel high-index resists for 193-nm immersion lithography and beyond

2007 ◽  
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2007 ◽  
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Ayako Sukegawa ◽  
Satoshi Ishiyama ◽  
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Current Status ◽  
Immersion Lithography

New high-index fluids for immersion lithography

2006 ◽  
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Immersion Lithography

High-index resist for 193-nm immersion lithography

2008 ◽  
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C. Grant Willson
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2008 ◽  
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High-index immersion lithography: preventing lens photocontamination and identifying optical behavior of LuAG

2008 ◽  
Author(s):  
V. Liberman ◽  
M. Rothschild ◽  
S. T. Palmacci ◽  
R. Bristol ◽  
J. Byers ◽  
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Optical Behavior

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2007 ◽  
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Jan Mulkens ◽  
Paul Graeupner ◽  
Diane McCafferty ◽  
Louis Markoya ◽  
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High Index ◽  
Immersion Lithography

Birefringence issues with uniaxial crystals as last lens elements for high-index immersion lithography

2009 ◽  
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Eric C. Benck ◽  
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Gabriel Y. Sirat ◽  
Chris Mack
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High Index ◽  
Immersion Lithography

Studies of high index immersion lithography

2008 ◽  
Author(s):  
Yasuhiro Ohmura ◽  
Hiroyuki Nagasaka ◽  
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High Index ◽  
Immersion Lithography
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