Screening of second-generation high-index liquids

Mapping Intimacies ◽

10.1117/12.713110 ◽

2007 ◽

Cited By ~ 6

Author(s):

Eric Hendrickx ◽

Sergei Postnikov ◽

Philippe Foubert ◽

Roel Gronheid ◽

ByeongSoo Kim

Keyword(s):

Second Generation ◽

High Index

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High-index immersion lithography with second-generation immersion fluids to enable numerical aperatures of 1.55 for cost effective 32-nm half pitches

10.1117/12.712234 ◽

2007 ◽

Cited By ~ 8

Author(s):

R. H. French ◽

V. Liberman ◽

H. V. Tran ◽

J. Feldman ◽

D. J. Adelman ◽

...

Keyword(s):

Second Generation ◽

Cost Effective ◽

High Index ◽

Immersion Lithography

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The usefulness of high index low symmetry zone axes for holz line analysis

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100126718 ◽

1987 ◽

Vol 45 ◽

pp. 384-385

Author(s):

C. M. Sung ◽

D. B. Williams

Keyword(s):

Lattice Parameter ◽

High Order ◽

Zone Axis ◽

High Index ◽

High Symmetry ◽

Second Phases ◽

Line Patterns ◽

Low Symmetry ◽

Line Analysis

Researchers have tended to use high symmetry zone axes (e.g. <111> <114>) for High Order Laue Zone (HOLZ) line analysis since Jones et al reported the origin of HOLZ lines and described some of their applications. But it is not always easy to find HOLZ lines from a specific high symmetry zone axis during microscope operation, especially from second phases on a scale of tens of nanometers. Therefore it would be very convenient if we can use HOLZ lines from low symmetry zone axes and simulate these patterns in order to measure lattice parameter changes through HOLZ line shifts. HOLZ patterns of high index low symmetry zone axes are shown in Fig. 1, which were obtained from pure Al at -186°C using a double tilt cooling holder. Their corresponding simulated HOLZ line patterns are shown along with ten other low symmetry orientations in Fig. 2. The simulations were based upon kinematical diffraction conditions.

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