500-mm aperture wavelength-tuning phase-shifting interferometer

2006 ◽  
Author(s):  
Liqun Chai ◽  
Qiao Xu ◽  
Yan Deng ◽  
Guiping Cheng ◽  
Jiancheng Xu ◽  
...  
Keyword(s):  
Phase Shifting ◽  
Wavelength Tuning

Principal and Error Analysis on Measurement of Multiple-Surface Interference with Wavelength-Tuning Phase-Shifting

2013 ◽  
Vol 40 (10) ◽  
pp. 1008007 ◽  
Author(s):  
刘勇 Liu Yong ◽  
刘旭 Liu Xu ◽  
任寰 Ren Huan ◽  
姜宏振 Jiang Hongzhen ◽  
杨一 Yang Yi ◽  
...  
Keyword(s):  
Error Analysis ◽  
Phase Shifting ◽  
Wavelength Tuning

scholarly journals Precise Measurement of the Surface Shape of Silicon Wafer by Using a New Phase-Shifting Algorithm and Wavelength-Tuning Interferometer

2020 ◽  
Vol 10 (9) ◽  
pp. 3250
Author(s):  
Fuqing Miao ◽  
Seokyoung Ahn ◽  
Yangjin Kim
Keyword(s):  
Silicon Wafer ◽  
Phase Error ◽  
Surface Profile ◽  
Phase Shifting ◽  
Wavelength Tuning ◽  
Surface Shape ◽  
Window Function ◽  
Phase Shift Error ◽  
Coupling Error ◽  
New Phase

In wavelength-tuning interferometry, the surface profile of the optical component is a key evaluation index. However, the systematic errors caused by the coupling error between the higher harmonics and phase shift error are considerable. In this research, a new 10N − 9 phase-shifting algorithm comprising a new polynomial window function and a DFT is developed. A new polynomial window function is developed based on characteristic polynomial theory. The characteristic of the new 10N − 9 algorithm is represented in the frequency domain by Fourier description. The phase error of the new algorithm is also discussed and compared with other phase-shifting algorithms. The surface profile of a silicon wafer was measured by using the 10N − 9 algorithm and a wavelength-tuning interferometer. The repeatability measurement error across 20 experiments was 2.045 nm, which indicates that the new 10N − 9 algorithm outperforms the conventional phase-shifting algorithm.

Research on the Randomly Phase Shifting Algorithm with Wavelength Tuning

2012 ◽  
Vol 39 (5) ◽  
pp. 0508002
Author(s):  
郭仁慧 Guo Renhui ◽  
李建欣 Li Jianxin ◽  
朱日宏 Zhu Rihong ◽  
陈磊 Chen Lei
Keyword(s):  
Phase Shifting ◽  
Wavelength Tuning

500-mm-aperture wavelength-tuning phase-shifting interferometer

2005 ◽  
Author(s):  
Liqun Chai ◽  
Qiao Xu ◽  
Yingjie Yu ◽  
Yang Deng ◽  
Jiancheng Xu
Keyword(s):  
Phase Shifting ◽  
Wavelength Tuning
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