A high-precision automatic phase shifting algorithm with wavelength tuning

2020 ◽  
Author(s):  
Shu Su ◽  
Ping Zhong ◽  
Xin Tang ◽  
Zhisong Li ◽  
Tianbao Zhai ◽  
...  
Keyword(s):  
High Precision ◽  
Phase Shifting ◽  
Wavelength Tuning ◽  
Automatic Phase

High-precision phase-shifting interferometry with spherical wavefront reference

2012 ◽  
Vol 52 (1) ◽  
pp. A188 ◽  
Author(s):  
Xianfeng Xu ◽  
Guangcan Lu ◽  
Yanjie Tian ◽  
Guoxia Han ◽  
Hongguang Yuan ◽  
...  
Keyword(s):  
High Precision ◽  
Phase Shifting ◽  
Phase Shifting Interferometry ◽  
Precision Phase ◽  
Spherical Wavefront

A High Precision Synthetic Method of Sub-Holograms in Phase-Shifting Synthetic Aperture Digital Hologram

2011 ◽  
Vol 31 (5) ◽  
pp. 0509001 ◽  
Author(s):  
李红燕 Li Hongyan ◽  
马志俭 Ma Zhijian ◽  
钟丽云 Zhong Liyun ◽  
吕晓旭 Lü Xiaoxu
Keyword(s):  
High Precision ◽  
Phase Shifting ◽  
Synthetic Aperture ◽  
Synthetic Method ◽  
Digital Hologram

Principal and Error Analysis on Measurement of Multiple-Surface Interference with Wavelength-Tuning Phase-Shifting

2013 ◽  
Vol 40 (10) ◽  
pp. 1008007 ◽  
Author(s):  
刘勇 Liu Yong ◽  
刘旭 Liu Xu ◽  
任寰 Ren Huan ◽  
姜宏振 Jiang Hongzhen ◽  
杨一 Yang Yi ◽  
...  
Keyword(s):  
Error Analysis ◽  
Phase Shifting ◽  
Wavelength Tuning

Measurement Errors in 632.8 nm High Precision Phase-Shifting Fizeau Interferometer

2010 ◽  
Vol 47 (4) ◽  
pp. 041202
Author(s):  
魏豪明 Wei Haoming ◽  
邢廷文 Xing Tingwen ◽  
李云 Li Yun ◽  
刘志祥 Liu Zhixiang
Keyword(s):  
High Precision ◽  
Measurement Errors ◽  
Phase Shifting ◽  
Fizeau Interferometer ◽  
Precision Phase

The Analysis and Design of a Large Stroke with High-Precision Polarized Laser Interferometer System

2016 ◽  
Vol 679 ◽  
pp. 129-134
Author(s):  
Wan Duo Wu ◽  
Qiang Xian Huang ◽  
Chao Qun Wang ◽  
Ting Ting Wu ◽  
Hong Xie
Keyword(s):  
High Precision ◽  
Measurement Accuracy ◽  
Laser Interferometer ◽  
Laser Interferometry ◽  
Phase Shifting ◽  
Single Frequency ◽  
Rejection Method ◽  
The Common ◽  
Frequency Laser ◽  
Polarization Phase

The technique utilizing single-frequency laser interferometry has very high measurement accuracy, but it has rigorous requirements for optical design which is affected by many factors. In order to achieve single-frequency laser interferometry with large stroke and high precision, the integral layout, the polarization phase shifting technique and the common mode rejection method are adopted to design the length interferometry system. This paper analyzes factors and design requirements which affect measurement accuracy with large stroke. Based on polarization phase shifting technique, the system employs the four-beam-signal detection technique and the common mode rejection method, to make a differential processing of four mutually orthogonal signals. Thus, the influences of zero-drift of intensity and environmental change on system are reduced. Combined with a 200 phase subdivision, the system achieves the resolution with 0.8 nm. Under the VC++ environment, the displacement measurement results are compensated and corrected according to the environmental parameters. Compared with the Renishaw XL-80 laser interferometer, the system has better stability in short term. In the measuring range of 60 mm, the effectiveness of the system is verified.

scholarly journals Precise Measurement of the Surface Shape of Silicon Wafer by Using a New Phase-Shifting Algorithm and Wavelength-Tuning Interferometer

2020 ◽  
Vol 10 (9) ◽  
pp. 3250
Author(s):  
Fuqing Miao ◽  
Seokyoung Ahn ◽  
Yangjin Kim
Keyword(s):  
Silicon Wafer ◽  
Phase Error ◽  
Surface Profile ◽  
Phase Shifting ◽  
Wavelength Tuning ◽  
Surface Shape ◽  
Window Function ◽  
Phase Shift Error ◽  
Coupling Error ◽  
New Phase

In wavelength-tuning interferometry, the surface profile of the optical component is a key evaluation index. However, the systematic errors caused by the coupling error between the higher harmonics and phase shift error are considerable. In this research, a new 10N − 9 phase-shifting algorithm comprising a new polynomial window function and a DFT is developed. A new polynomial window function is developed based on characteristic polynomial theory. The characteristic of the new 10N − 9 algorithm is represented in the frequency domain by Fourier description. The phase error of the new algorithm is also discussed and compared with other phase-shifting algorithms. The surface profile of a silicon wafer was measured by using the 10N − 9 algorithm and a wavelength-tuning interferometer. The repeatability measurement error across 20 experiments was 2.045 nm, which indicates that the new 10N − 9 algorithm outperforms the conventional phase-shifting algorithm.

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