Multi-surface phase separation based on wavelength-tuning phase-shifting interferometry

2020 ◽  
Author(s):  
Lin Chang ◽  
Ketao Yan ◽  
Weiwei Zheng ◽  
Tao Sun ◽  
Yingjie Yu
Keyword(s):  
Phase Separation ◽  
Phase Shifting ◽  
Wavelength Tuning ◽  
Surface Phase ◽  
Phase Shifting Interferometry

Multi-surface wavelength-tuning phase-shifting interferometry with parasitic fringes

2020 ◽  
Vol 28 (12) ◽  
pp. 2605-2613
Author(s):  
Lin CHANG ◽  
◽  
Ke-tao YAN ◽  
Chen WANG ◽  
Tao SUN ◽  
...  
Keyword(s):  
Phase Shifting ◽  
Wavelength Tuning ◽  
Phase Shifting Interferometry

Phase-shifting interferometry with uncalibrated phase shifts

2000 ◽  
Vol 39 (4) ◽  
pp. 585 ◽  
Author(s):  
Xin Chen ◽  
Maureen Gramaglia ◽  
John A. Yeazell
Keyword(s):  
Phase Shifts ◽  
Phase Shifting ◽  
Phase Shifting Interferometry
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