Fabrication of mesoporous silica for ultra-low-k interlayer dielectrics

2005 ◽  
Author(s):  
Nobutoshi Fujii ◽  
Kazuo Kohmura ◽  
Takahiro Nakayama ◽  
Hirofumi Tanaka ◽  
Nobuhiro Hata ◽  
...  
Keyword(s):  
Mesoporous Silica ◽  
Interlayer Dielectrics ◽  
Low K

Highly Densified Mesoporous Bulk Silica Prepared with Colloidal Mesoporous Silica Nanoparticles toward a New Low-k Material

2012 ◽  
Vol 41 (11) ◽  
pp. 1518-1519 ◽  
Author(s):  
Norihiro Suzuki ◽  
Yu-Tzu Huang ◽  
Yoshihiro Nemoto ◽  
Atsushi Nakahira ◽  
Yusuke Yamauchi
Keyword(s):  
Mesoporous Silica ◽  
Silica Nanoparticles ◽  
Mesoporous Silica Nanoparticles ◽  
Bulk Silica ◽  
Low K

scholarly journals Porosity Effects on Properties of Mesoporous Silica Low-k Films Prepared Using Tetraethylorthosilicate with Different Templates

2007 ◽  
Vol 154 (1) ◽  
pp. G1 ◽  
Author(s):  
Chih-Yuan Ting ◽  
Hwo-Shuenn Sheu ◽  
Wen-Fa Wu ◽  
Ben-Zu Wan
Keyword(s):  
Mesoporous Silica ◽  
Low K

scholarly journals Carbon-Enriched Amorphous Hydrogenated Boron Carbide Films for Very-Low-k Interlayer Dielectrics

2017 ◽  
Vol 3 (12) ◽  
pp. 1700116 ◽  
Author(s):  
Bradley J. Nordell ◽  
Thuong D. Nguyen ◽  
Anthony N. Caruso ◽  
Sudhaunshu S. Purohit ◽  
Nathan A. Oyler ◽  
...  
Keyword(s):  
Boron Carbide ◽  
Interlayer Dielectrics ◽  
Amorphous Hydrogenated Boron Carbide ◽  
Low K

The preparation of mesoporous silica ultra-low-k film using ozone ashing treatment

2005 ◽  
Vol 483 (1-2) ◽  
pp. 283-286 ◽  
Author(s):  
A.T. Cho ◽  
F.M. Pan ◽  
K.J. Chao ◽  
P.H. Liu ◽  
J.Y. Chen
Keyword(s):  
Mesoporous Silica ◽  
Low K

Sea of leads compliant I/O interconnect process integration for the ultimate enabling of chips with low-k interlayer dielectrics

2005 ◽  
Vol 28 (3) ◽  
pp. 488-494 ◽  
Author(s):  
M.S. Bakir ◽  
B. Dang ◽  
R. Emery ◽  
G. Vandentop ◽  
P.A. Kohl ◽  
...  
Keyword(s):  
Process Integration ◽  
Interlayer Dielectrics ◽  
Low K

Mesoporous silica reinforced cyanate ester nanocomposites for low k dielectric applications

2013 ◽  
Vol 179 ◽  
pp. 157-164 ◽  
Author(s):  
S. Devaraju ◽  
M.R. Vengatesan ◽  
M. Selvi ◽  
J.K. Song ◽  
M. Alagar
Keyword(s):  
Mesoporous Silica ◽  
Cyanate Ester ◽  
Low K
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