Carbon-Enriched Amorphous Hydrogenated Boron Carbide Films for Very-Low-k
Interlayer Dielectrics
2017 ◽
Vol 3
(12)
◽
pp. 1700116
◽
Keyword(s):
2011 ◽
Vol 23
(43)
◽
pp. 435002
◽
2016 ◽
Vol 2
(7)
◽
pp. 1600073
◽
Keyword(s):
Keyword(s):
2001 ◽
pp. 4644-4651
◽