Matching multiple-feature CD response from exposure tools: analysis of error sources with their impact in low-k1 regime

Author(s):  
Jo Finders ◽  
Mircea Dusa
2012 ◽  
Vol 15 (3) ◽  
pp. 207-211
Author(s):  
Yue MAO ◽  
Jianpeng CHEN ◽  
Wei DAI ◽  
Xiaolin JIA

2018 ◽  
Vol 42 (4) ◽  
pp. 594-608
Author(s):  
Liu Shu-yu ◽  
Liu Jia-cheng ◽  
Zhu Zi

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