Building an infrastructure for parametric yield analysis: concept and implementation of a DFM platform (Invited Paper)

2005 ◽  
Author(s):  
John Gookassian ◽  
Bob Pack ◽  
Mitch Heins ◽  
John Garcia ◽  
Hitendra Divecha ◽  
...  
Author(s):  
Shyam Praveen Vudathu ◽  
Umamaheswara Reddy Vemulapati ◽  
Duane Boning ◽  
Vasudevarao Ramanolla ◽  
Rainer Laur ◽  
...  

Author(s):  
K. Agarwal ◽  
R. Rao ◽  
D. Sylvester ◽  
R. Brown

Author(s):  
Chris Schuermyer ◽  
Brady Benware ◽  
Graham Rhodes ◽  
Davide Appello ◽  
Vincenzo Tancorre ◽  
...  

Abstract This work presents the first application of a diagnosis driven approach for identifying systematic chain fail defects in order to reduce the time spent in failure analysis. The zonal analysis methodology that is applied separates devices into systematic and random populations of chain fails in order to prevent submitting random defects for failure analysis. Two silicon case studies are presented to validate the production worthiness of diagnosis driven yield analysis for chain fails. The defects uncovered in these case studies are very subtle and would be difficult to identify with any other methodology.


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